2017
DOI: 10.1016/j.proeng.2017.01.180
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The Influence of Lot Size on Production Performance in Wafer Fabrication Based on Simulation

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Cited by 9 publications
(5 citation statements)
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“…MPW runs uses Multi Layer Reticule technic to reduce the overall cost of the mask and additional dies. For our purposes, we consider a small scale project to be a project with at most 25 wafers [20] . For large scale projects, a market study published at the FDSOI Forum in 2018 showed that the die manufacturing cost per 40 mm 2 is 0.9 USD for the 28nm technology [8].…”
Section: Asic Fabrication and Running Costmentioning
confidence: 99%
“…MPW runs uses Multi Layer Reticule technic to reduce the overall cost of the mask and additional dies. For our purposes, we consider a small scale project to be a project with at most 25 wafers [20] . For large scale projects, a market study published at the FDSOI Forum in 2018 showed that the die manufacturing cost per 40 mm 2 is 0.9 USD for the 28nm technology [8].…”
Section: Asic Fabrication and Running Costmentioning
confidence: 99%
“…For small scale projects with more than 100 die, the price for a lot of 100 extra die is between 21,120 and 38,500 USD depending on the die area. For our purposes, we consider a small scale project to be a project with at most 25 wafers [15] . For large scale projects, a market study published at the FDSOI Forum in 2018 showed that the die manufacturing cost per 40 mm 2 is 0.9 USD for the 28 nm technology [16].…”
Section: Asic Fabrication and Running Costmentioning
confidence: 99%
“…However, there still exists a trade-off between the resolution capability and the throughput. 13,14) Here, in general, the wet process is a batch process, 15) and it is a great benefit to handle several wafers at one time and thus, both high resolution capability and high throughput can be expected at the same time because of the improvement of the resolution capability by this method.…”
Section: Introductionmentioning
confidence: 99%