This thesis explores various processing and materials aspects of an oxide solar cell. A tandem structure consisting of a Silicon (Si) bottom cell, and a Cuprous Oxide (Cu 2 O)/Zinc Oxide (ZnO) top cell is suggested, and several materials challenges relevant for the design is addressed. Using Flash Lamp Annealing, shallow p-type emitters are produced in Si by indiffusion of Boron (B) from a surface source. The B diffusion is shown to be enhanced by a transient of Si interstitials originating from the surface coating. The n ++-side of a Si tunneling junction is realized by sputter depositing highly Phosphorus (P) doped Si thin films on quartz. The P activation and thin film conductivity are highest after prolonged, high temperature annealing, and thin film roughness is significantly reduced after a Reactive Ion Etch treatment of the quartz substrates. A rectifying Cu 2 O/Si heterojunction is demonstrated, and most of its depletion layer is located in Si showing that the acceptor concentration in the sputtered Cu 2 O is significantly higher than 1.1×10 17 cm −3. Epitaxial growth of Cu 2 O is realized on single crystal ZnO, and XRD measurements reveal that the Cu 2 O grows in two separate [111]-oriented domains which are rotated 180 • relative to each other. Further, a thin, detrimental layer of CuO is evidenced by TEM at the interface between the sputtered Cu 2 O and the ZnO single crystal. Homoepitaxial sputter growth of ZnO is investigated in some detail, and the growth is found to depend on sputter target power density, substrate polarity, and growth ambient. Specifically, c-axis growth is promoted when growing on the Zn-face of ZnO, while slower, in-plane growth is promoted during O-face growth and during growth in a Nitrogen ambient. Treating sputter grown Cu 2 O thin films by Rapid Thermal Annealing is demonstrated by XRD, PL and Hall effect measurements to be highly beneficial for the thin film structural quality. Finally, two band gap defects in Cu 2 O are revealed using Temperature Dependent Hall effect measurements, and the defect ionization energy values are found to be dependent on sample strain.