The influence of organic additives on the thickness distribution of tubular metallized through-holes

Wünsche, M.; Dahms, W.; Meyer, H.; Schumacher, R.

doi:10.1016/0013-4686(94)e0027-w

Cited by 13 publications

(11 citation statements)

References 11 publications

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“…The ability of a leveler to quench SPS-derived activity is readily examined using the same electroanalytical methods. A brief survey of the literature indicates that levelers are utilized over a broad concentrations ranging between 0.5 and 500 mol/L [11,12,[26][27][28]38,[40][41][42][43]. Recent experiments have identified two effective levelers for use in damascene process- [28] and polyethyleneimine (PEI) [38].…”

Section: Peg-cl-sps-lev Systemmentioning

confidence: 99%

Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing

Moffat

Wheeler

Kim

et al. 2007

Electrochimica Acta

143

116

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This article was published in an Elsevier journal. The attached copy is furnished to the author for non-commercial research and education use, including for instruction at the author's institution, sharing with colleagues and providing to institution administration.Other uses, including reproduction and distribution, or selling or licensing copies, or posting to personal, institutional or third party websites are prohibited.In most cases authors are permitted to post their version of the article (e.g. in Word or Tex form) to their personal website or institutional repository. Authors requiring further information regarding Elsevier's archiving and manuscript policies are encouraged to visit:

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Section: Peg-cl-sps-lev Systemmentioning

confidence: 99%

Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing

Moffat

Wheeler

Kim

et al. 2007

Electrochimica Acta

143

116

View full text Add to dashboard Cite

show abstract

“…The different plateaux observed for ΔI/I clearly correlate with the corresponding nucleation mechanisms. Conclusions about the levelling ability, m cr , of the process electrolytes from the plateau situation are demonstrated in investigations of rough substrates (see Figure 11 (b)) 11…”

Section: Discussionmentioning

confidence: 91%

“…These measurements are shown as Tafel plots: lg |j| vs U. The plots obtained using process electrolytes A‐D are compared in Figure 7 11,13. The figure shows that the addition of crystal violet causes a shift of the plot along the potential axis towards more negative potentials as well as a reduction of the Tafel slope, S T .…”

Section: Tafel Electrode Kineticsmentioning

confidence: 99%

“…Most recently, the use of mass‐sensitive quartz oscillators and measurement of the light reflection of vertically growing electrodes have been discussed. The necessary orienting experiments had previously been carried out with equipment on which charge, mass and light reflection could only be measured separately 7891011. The advantage of these measuring techniques is that instrumentation is currently available which can measure the effect of electrolyte additives on the plating process directly.…”

Section: Introductionmentioning

confidence: 99%

“…The measuring system presented here was developed by combining three independently acting measurement techniques. The combined procedure was tested in this form for the first time in electrochemical experiments and electroplating practice 1112. Combining coulometry, microgravimetry and optical reflection measurement makes it possible to follow the charge flow and the resulting mass change directly and simultaneously, and to record the reflectivity of the metal surface produced.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Morphology and Stability of Electrochemically Generated Copper Layers: The Effect of Electron Transfer and Nucleation Kinetics

1996

Self Cite

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This paper reports on a method for in‐situ observation of the morphology and stability of electrochemically generated metal layers. This information is obtained by comparing topographical and kinetic data. The method is based on coulometric, microgravimetric and optical measurement performed in situ on vertically growing electrodes. Measurements are obtained simultaneously from the same surface area.

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Simultaneous Monitoring and Evaluation of Current and Mass Transients with the QCMB in the Millisecond Range

et al. 1999

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An experimental set-up is described which allows the simultaneous recording of current and mass transients with millisecond resolution by using 5 MHz quartz resonators operated in a liquid environment. At the same time a mass resolution of a few nanograms is realized. It is demonstrated that this set-up allows the application of fast potential pulses to electrochemically depositastrip copper adlayers. The results proved that the obtained frequency response of the QCMB of 1 ms due to a sudden mass change has to be regarded as an upper limit and is independent on the type of oscillator circuit used. Thus, this technique allows monitoring and evaluation of fast electrode processes such as copper depositionastripping by comparing current and mass transients recorded simultaneously. With this technique the integral sensitivity E i for quartz resonators contacted with one face to a liquid was reinvestigated on the basis of charge and frequency changes associated with absolute mass changes spanning from the monolayer regime up to more than one hundred atomic layers. An unexpected sensitivity drop is observed in the lower monolayer regime which is related to interfacial processes that occur due to shear elongations at the phase boundary solidaliquid.

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The influence of organic additives on the thickness distribution of tubular metallized through-holes

Cited by 13 publications

References 11 publications

Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing

Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing

Morphology and Stability of Electrochemically Generated Copper Layers: The Effect of Electron Transfer and Nucleation Kinetics

Simultaneous Monitoring and Evaluation of Current and Mass Transients with the QCMB in the Millisecond Range

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