The influence of residual gas on boron carbide thin films prepared by magnetron sputtering

Jiang, Hui; Zhu, Jingtao; Huang, Qiushi; Jin, Xu; Wang, Xiaoqiang; Wang, Zhanshan; Pfauntsch, Sławka J.; Michette, A. G.

doi:10.1016/j.apsusc.2011.06.113

Cited by 19 publications

(9 citation statements)

References 25 publications

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“…A deconvolution of the boron spectra indicate the main chemical state at 188.1 eV which we assign to boron carbide (B-C) and the shoulder at 189.8 eV assigned to boron sub-oxide (B-C-O). Similar results have been shown in [31,32], where the B4C component was reported at ∼188.4 eV and ∼188.6 eV, respectively. The boron sub-oxide state is a result of a chemical surface reaction that can originate from the atmosphere inside the sputtering machine during deposition, when the film is exposed to the ambient atmosphere or a combination of the two.…”

Section: The Chemical Composition Of Single Layer Iridium and Boron Carbide Filmssupporting

confidence: 89%

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

et al. 2020

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We present an experimental examination of iridium and boron carbide thin film coatings for the purpose of fabricating X-ray optics. We use a combination of X-ray reflectometry and X-ray photoelectron spectroscopy to model the structure, composition, density, thickness and micro-roughness of the thin films. We demonstrate in our analyses how the two characterization techniques are complementary and from this we derive that an overlayer originating from atmospheric contamination with a thickness between 1.0-1.6 nm is present on the surface. The magnetron sputtered iridium films are measured to have a density of 22.4 g/cm 3 . The boron carbide film exhibits a change in chemical composition in the top ∼2 nm of the film surface when exposed to the ambient atmosphere. The chemical reaction occurring on the surface is due to an incorporation of oxygen and hydrogen present in the ambient atmosphere. Lastly, we present a correlation between the absorption edges and the emission lines exhibited by the thin films in an energy range from 50-800 eV and the impact on the reflectivity performance due to contamination in thin films.

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Section: The Chemical Composition Of Single Layer Iridium and Boron Carbide Filmssupporting

confidence: 89%

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

et al. 2020

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“…The impurity content is normally lower in the higher vacuum environment. At low vacuum degree, the residual impurity gas can enter the sputtered coating, causing pinholes or holes and reducing the compactness of the Al coatings . This explains the decreasing porosity of the magnetron sputtered Al coatings with increasing vacuum degree (Figures and ).…”

Section: Resultsmentioning

confidence: 99%

Effect of vacuum degree on adhesion strength and corrosion resistance of magnetron sputtered aluminum coating on NdFeB magnet

Zhang

Zheng

Song

et al. 2019

Materials & Corrosion

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A pure aluminum (Al) coating was deposited by direct current (DC) magnetron sputtering onto sintered NdFeB magnet coupons and glass slides at different vacuum degrees. The effect of vacuum degree on adhesion strength and corrosion resistance of the coating was investigated. The results showed that the adhesion strength between the Al coating and the substrate NdFeB magnet increased first and then decreased while the corrosion resistance of the Al coating increased with increasing vacuum degree. The Al coating formed at the low vacuum degree fractured within the coating when being peeled off because of a relatively high density of coating defects, while that formed at the high vacuum degree was mainly debonded along the coating/ substrate interface. The decreased adhesion strength when the vacuum degree further increased could be attributed to excessive internal stress. The Al coating deposited at high vacuum degree was more corrosion resistant than that formed at low vacuum as the coating becomes less porous. Due to the presence of the micro defects, the corrosion behavior of the Al coating was accelerated on the substrate NdFeB magnet through the galvanic effect via these defects. K E Y W O R D Sadhesion, aluminum coating, corrosion, magnet, magnetron sputtering

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“…The outermost layer thickness increases apparently by over 10% for the La/B 4 C and Mo/B 4 C multilayers because lanthanum and molybdenum have stronger oxidation capabilities than tungsten so that oxygen atoms penetrate through the B 4 C layer gradually and react with metal atoms. The surface B 4 C layer was also determined to absorb oxygen (Jiang et al, 2011b). Thus it is important to deposit a stable capping layer to protect the multilayer structure.…”

Section: Resultsmentioning

confidence: 99%

Interface characterization of B₄C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering

Jiang

Wang

Zhu

2013

J Synchrotron Radiat

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B4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B4C, Mo/B4C and La/B4C multilayers were compared. W/B4C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B4C and Mo/B4C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B4C-based multilayers.

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The influence of residual gas on boron carbide thin films prepared by magnetron sputtering

Cited by 19 publications

References 25 publications

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

Effect of vacuum degree on adhesion strength and corrosion resistance of magnetron sputtered aluminum coating on NdFeB magnet

Interface characterization of B₄C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering

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The influence of residual gas on boron carbide thin films prepared by magnetron sputtering

Cited by 19 publications

References 25 publications

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

Investigation of boron carbide and iridium thin films, an enabling technology for future x-ray telescopes

Effect of vacuum degree on adhesion strength and corrosion resistance of magnetron sputtered aluminum coating on NdFeB magnet

Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering

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Interface characterization of B₄C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering