1993
DOI: 10.1016/0257-8972(93)90003-7
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The influence of titanium interlayers on the adhesion of PVD TiN coatings on oxidized stainless steel substrates

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Cited by 33 publications
(13 citation statements)
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“…In order to achieve a better adherence of TiN in the substrate [18,19], and based on some preliminary tests, an The deposition of TiN was carried out by means of reactive plasma, using a Leybold-Heraeus equipment and dc planar magnetron sputtering, under different conditions of applied current, Ar/N 2 flow ratio (J Ar /J N 2 ) and bias voltage, as shown in Table 1. The total pressure inside the chamber remained fixed at 0.27 Pa.…”
Section: Methodsmentioning
confidence: 99%
“…In order to achieve a better adherence of TiN in the substrate [18,19], and based on some preliminary tests, an The deposition of TiN was carried out by means of reactive plasma, using a Leybold-Heraeus equipment and dc planar magnetron sputtering, under different conditions of applied current, Ar/N 2 flow ratio (J Ar /J N 2 ) and bias voltage, as shown in Table 1. The total pressure inside the chamber remained fixed at 0.27 Pa.…”
Section: Methodsmentioning
confidence: 99%
“…Plasma nitriding was conducted in an atmosphere of N 2 (4 sccm), H 2 (80 sccm) and Ar (30 sccm), at a pressure of approximately 3 × 10 − 3 Torr, and temperature of 520°C. Then, a titanium interlayer (with thickness ∼100 nm) was deposited in order to have a better TiN adherence to the substrate [36]. Finally, the TiN films were deposited in an atmosphere of N 2 (4 sccm) and Ar (20 sccm) at a temperature of 300°C and pressure of approximately 3.5 × 10 − 3 Torr.…”
Section: Tin Depositionmentioning
confidence: 99%
“…It is often chosen as a surface coating to improve the tribological characteristics of materials [6][7][8][9][10]. Much study has been carried out on the friction and wear behavior of ceramic against metals and ceramics against ceramics couples in sliding contact.…”
Section: Introductionmentioning
confidence: 99%