The integration of simulation and response surface methodology for the optimization of IC processes

Gaston, G.J.; Walton, A.J.

doi:10.1109/66.286830

Cited by 44 publications

(7 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Regarding the composition of two response surface functions, this idea is to achieve a balance between the combined two normalized response surface functions associated with the weight constants. The WCR function 19) is…”

Section: Weighted Composite Response Methodsmentioning

confidence: 99%

Design of Optimum the Insulator Gate Bipolar Transistor using Response Surface Method with Cluster Analysis

Wang¹,

Lai

Huang

et al. 2004

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

In this paper, a statistical methodology that can be used for the optimization of the Insulator Gate Bipolar Transistor (IGBT) devices is proposed. This is achieved by integrating the response surface method (RSM) with cluster analysis, weighted composite method and genetic algorithm (GA). The device characteristic of IGBT was simulated based upon the fabrication simulator, ATHENA, and the device simulator, ATLAS. This methodology, yielded another way to investigate the IGBT device and to make a decision in the tradeoff between the breakdown voltage and the on-resistance. In this methodology, we also show how to use cluster analysis to determine the dominant factors that are not visible in the screening of all experiments.

show abstract

Section: Weighted Composite Response Methodsmentioning

confidence: 99%

Design of Optimum the Insulator Gate Bipolar Transistor using Response Surface Method with Cluster Analysis

Wang¹,

Lai

Huang

et al. 2004

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…The technique may be applied to a system and evaluate the parameters that are of interest to the analyst. Gaston and Walton (1994) also applied RSM to a semiconductor facility, They realized that the application of RSM with simulation reduces the time spent if the experiment was evaluated changing one variable at a time. Boning and Mozumder (1994) To further collaborate to the search of increasing the ''bottom line" by reducing cost and increasing customer satisfaction is Manansang and Heim (1996).…”

Section: O P T Im Iz a T Io N T E C H N Iq U E S F O R S Im U L A T Io Nmentioning

confidence: 99%

A study of response surface in simulation of emergency room systems

Correa¹

View full text Add to dashboard Cite

“…To determine values for the differentials, we propose a method based upon an adapted response surface mapping (RSM) technique. RSM techniques require a surface to be created and 0894-6507/00$10.00 © 2000 IEEE a suitable polynomial mapped to that surface [11]- [13]. Through the proper application of design of experiment techniques, the number of points used to create the surface can be minimized.…”

Section: Third-order Variance Equationmentioning

confidence: 99%

Derivation of a nonlinear variance equation and its application to SOI technology

Rowlands

Dimitrijev

2000

IEEE Trans. Semicond. Manufact.

View full text Add to dashboard Cite

An analytic nonlinear equation for variance was derived along with a method based on response surface mapping techniques to calculate the variance using the proposed equation. The technique was applied to the threshold voltage of a 0.1-m silicon-on-insulator MOS device, and the variance value obtained was verified using Monte Carlo simulation. The threshold voltage dependence upon active-layer thickness was found to be highly nonlinear due to the device's going from the fully depleted to the partially depleted regime. Analysis of the variance showed that the effect of the nonlinear terms (18.7%) is more important than the effect of the mixed term (0.7%) and almost as important as the contribution of the second most dominant input-process parameter (23.6%). This illustrates the importance of the proposed nonlinear equation.

show abstract

The integration of simulation and response surface methodology for the optimization of IC processes

Cited by 44 publications

References 13 publications

Design of Optimum the Insulator Gate Bipolar Transistor using Response Surface Method with Cluster Analysis

Design of Optimum the Insulator Gate Bipolar Transistor using Response Surface Method with Cluster Analysis

A study of response surface in simulation of emergency room systems

Derivation of a nonlinear variance equation and its application to SOI technology

Contact Info

Product

Resources

About