2015
DOI: 10.4236/jmp.2015.614211
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The Interaction of Impurity Oxygen with Radiation Defects in Silicon Crystal

Abstract: Present paper describes the investigation of vacancy (V) and interstitial (I) annihilation on oxygen atoms by means of infrared (IR) absorption and Hall-effect measurements of the accumulation of vacancy-oxygen complexes (VO) in Si crystals at high energy electron irradiation. Silicon samples, containing along with isolated oxygen atoms, more complicated oxygen quasi-molecules of SiOn (n = 1, 2, 3…) type, were used. At isochronal and isothermal annealing in the temperature range of 300˚C-350˚C, apart from the … Show more

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“…In this case, the dose dependence behavior can been seen to differ from that in Figure 1, which may be explained in terms of the very great difference in the timescales over which the electron beam has been applied. In the case of the ultrafast pulse, a cluster which consists of A-centre (VO) type radiation defects is induced in the silicon crystal, despite the lower irradiation energy for cluster formation [9].…”
Section: Discussionmentioning
confidence: 99%
“…In this case, the dose dependence behavior can been seen to differ from that in Figure 1, which may be explained in terms of the very great difference in the timescales over which the electron beam has been applied. In the case of the ultrafast pulse, a cluster which consists of A-centre (VO) type radiation defects is induced in the silicon crystal, despite the lower irradiation energy for cluster formation [9].…”
Section: Discussionmentioning
confidence: 99%