The equilibration kinetics of single‐crystal TiO2 were determined in the rapid kinetics regime (within the first 10 h) within narrow ranges of oxygen activities, p(O2), under the conditions of 1198–1323 K and p(O2) = 10–10–105 Pa. The determined chemical diffusion coefficient, Dchem, is observed to exhibit a complex dependence on p(O2). Comparison of Dchem for single‐crystal and polycrystalline TiO2 demonstrates that the grain boundaries have a retarding effect on the transport of defects. The present work represents the first assessment of the effect of nonstoichiometry on well defined Dchem for TiO2 within a wide range of p(O2). (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)