The Meso- Piezo-Resistive Effects in MEMS/NEMS

Advancements in technology and design of NEMS vector hydrophone

“…Figure 1b is the Scanning Electron Microscope (SEM) images of resonant tunneling film. After some specific experiments, Zhang and Xue (2007) and Wen et al (2007) confirmed the process of meso-piezoresistance effect of resonant tunneling thin film. The maximum sensitivity of 8.33 9 10 -9 pa -1 has been measured and it is about two order higher than the silicon (the maximum sensitivity of silicon is 2.76 9 10 -11 pa -1 at normal temperature).…”

Development of a novel GaAs micromachined accelerometer based on resonant tunneling diodes

“…Meso-piezoresistive effects theory indicates that [9]: if a mechanical signal is acted on a related mechanical nanostructure, such as the resonant tunneling structure, the corresponding strain distribution will be produced in the structure. The strain distribution can generate built-in electric fields in resonant tunneling structures [10], and the resulting built-in electric fields will change the electronic energy states [11], the change of electronic energy state will influence on the value of the tunneling current.…”

Engineering application of MEMS vector hydrophone and self-adapting root-MUSIC algorithm

“…Borrow ideas from the lateral line sensing system of fish (Fig.1), a novel biomimetic MEMS vector hydrophone in Fig.2 has been developed [9,10], it is based on the mesopiezoresistive effect and the acoustics theory of cylinder [11,12], and it exploits the thin film of quantum well as the sensitive unit, which adopts cilia bionic structure. The sound waves cause the vibration of cilia acoustic cylinder, leading the internal of four-beam micro-structure generated distortion, and resulting in current of the MEMS sensitive unit resonant tunneling current changes and producing the meso-piezoresistive effect.…”

“…A novel biomimetic MEMS vector hydrophone has been developed by Xue, and has been measured for index [9,10,11,12].…”