The novel chamber hardware design to improve the thin film deposition quality in both 12″ (300mm) and 18″ (450mm) wafers with the development of 3D full chamber modeling and experimental visual technique

a b s t r a c tThis paper develops a unified analysis of stagnation flow heat and mass transport, considering both semiinfinite domains and finite gaps, with and without rotation of the stagnation surface. An important objective is to derive Nusselt-and Sherwood-number correlations that represent heat and mass transport at the stagnation surface. The approach is based on computationally solving the governing conservation equations in similarity form as a boundary-value problem. The formulation considers ideal gases and incompressible fluids. The correlated results depend on fluid properties in terms of Prandtl, Schmidt, and Damköhler numbers. Heterogeneous chemistry at the stagnation surface is represented as a single first-order reaction. A composite Reynolds number represents the combination of stagnation flows with and without stagnation-surface rotation.Published by Elsevier Ltd.

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Unified Nusselt- and Sherwood-number correlations in axisymmetric finite-gap stagnation and rotating-disk flows

Coltrin

Kee

2016

International Journal of Heat and Mass Transfer

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The novel chamber hardware design to improve the thin film deposition quality in both 12″ (300mm) and 18″ (450mm) wafers with the development of 3D full chamber modeling and experimental visual technique

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Unified Nusselt- and Sherwood-number correlations in axisymmetric finite-gap stagnation and rotating-disk flows

Unified Nusselt- and Sherwood-number correlations in axisymmetric finite-gap stagnation and rotating-disk flows

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