The NPMM-200: large area high resolution for freeform surface measurement

Schober, Christian; Pruß, Christof; Herkommer, Alois

doi:10.1117/12.2564918

Cited by 3 publications

(3 citation statements)

References 7 publications

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“…Process monitoring was performed throughout the process chain by the institute for applied optics (ITO). The ultra-precision machined master substrates were inspected in a Nanopositioning and nanomeasuring machine (NPMM-200) [ 29 ]. The written structures as well as the electroformed nickel structures were measured with a laser scanning microscope Mitaka MLP-3 (Mitaka Europe GmbH, Berlin, Germany) and a white light interferometer Veeco WykoNT9100 (Veeco Instruments, Inc., New York, NY, USA).…”

Section: Methodsmentioning

confidence: 99%

Injection Molding of Encapsulated Diffractive Optical Elements

et al. 2023

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Microstructuring techniques, such as laser direct writing, enable the integration of microstructures into conventional polymer lens systems and may be used to generate advanced functionality. Hybrid polymer lenses combining multiple functions such as diffraction and refraction in a single component become possible. In this paper, a process chain to enable encapsulated and aligned optical systems with advanced functionality in a cost-efficient way is presented. Within a surface diameter of 30 mm, diffractive optical microstructures are integrated in an optical system based on two conventional polymer lenses. To ensure precise alignment between the lens surfaces and the microstructure, resist-coated ultra-precision-turned brass substrates are structured via laser direct writing, and the resulting master structures with a height of less than 0.002 mm are replicated into metallic nickel plates via electroforming. The functionality of the lens system is demonstrated through the production of a zero refractive element. This approach provides a cost-efficient and highly accurate method for producing complicated optical systems with integrated alignment and advanced functionality.

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Section: Methodsmentioning

confidence: 99%

Injection Molding of Encapsulated Diffractive Optical Elements

et al. 2023

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“…In this setting, the design can satisfy the generalized Abbé's theorem in three dimensions and theoretically achieve zero Abbé error. Other designs like NPMM-200 [6] from Ilmenau University and Isara 400 [7] developed by IBS Precision Engineering utilize interferometers on each axis and directly trace the movement of the point of measurement.…”

Section: Design That Satisfies the Abbé Principlementioning

confidence: 99%

Development of a Novel Multifunctional Abbé-free 12"-Wafer Measuring Stage for Semiconductor Manufacturing

Liao¹,

Hung²,

Fang³

et al. 2022

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)

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design and develop a novel multifunctional Abbé free 12" wafer measuring stage is presented in this paper. The developed stage is designed and optimized, to be capable of integrating various optical measuring functional modules for defect detection and classification, CD measurement, 3-D dimensional inspection, and surface spectrum measurement in automated optical test (AOI). In work, the Abbé-principle design is adopted to minimize the volumetric errors of the stage's motion. With the framework of the stage established, the automatic parametric design is implemented with finite element method software to determine the lightest weight design within the tolerance of deformation and modal of the system. Ultra-low thermal-expansion material (Ohara CCZ-HS) is used to form a novel three-dimensional coordinate reference datum module located in the center of the stage to establish a precise metrological coordinate system for the stage. Furthermore, three-axis laser interferometry is designed to measure and compensate the Abbé-free point of the working datum, in order to maximize its positioning accuracy. By doing so, the volumetric errors induced by the stage movement can be minimized, so the positioning accuracy of the three-axis stage can be significantly improved. This system can achieve a scanning speed of 100 mm/s, and within the 300 300 5 mm measuring range, the absolute spatial positioning error is less than 50 nm, which can satisfy most stop-and-scan metrological operations in semiconductor manufacturing processes.

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“…The demand for extended measurement volumina has recently led to the development of the NPMM-200 providing a measurement range of 200 mm × 200 mm × 25 mm with a one-point positioning stability and repeatability of less than 2 nm for lateral measurements over the whole measurement area and a standard deviation of 20 pm for vertical repeatability measurements of a 5 mm step height standard, resulting in a relative resolution of 10 decades considering the full measurement range of 200 mm [ 26 , 32 ]. Currently, one machine is installed at the TU Ilmenau and another one at the Institut für Technische Optik (ITO) in Stuttgart, where it is applied e.g., for the characterization of freeform optics [ 33 ]. The positioning performance of the NPMM-200 sets new demands on the frequency stability of the laser sources used for the underlying interferometric length measurement systems.…”

Section: Introductionmentioning

confidence: 99%

A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm

Blumröder

Köchert

Fröhlich

et al. 2023

Sensors

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Since the turn of the millennium, the development and commercial availability of optical frequency combs has led to a steadily increase of worldwide installed frequency combs and a growing interest in using them for industrial-related metrology applications. Especially, GPS-referenced frequency combs often serve as a “self-calibrating” length standard for laser wavelength calibration in many national metrology institutes with uncertainties better than u = 1 × 10−11. In this contribution, the application of a He-Ne laser source permanently disciplined to a GPS-referenced frequency comb for the interferometric measurements in a nanopositioning machine with a measuring volume of 200 mm × 200 mm × 25 mm (NPMM-200) is discussed. For this purpose, the frequency stability of the GPS-referenced comb is characterized by heterodyning with a diode laser referenced to an ultrastable cavity. Based on this comparison, an uncertainty of u = 9.2 × 10−12 (τ = 8 s, k = 2) for the GPS-referenced comb has been obtained. By stabilizing a tunable He-Ne source to a single comb line, the long-term frequency stability of the comb is transferred onto our gas lasers increasing their long-term stability by three orders of magnitude. Second, short-term fluctuations-related length measurement errors were reduced to a value that falls below the nominal resolving capabilities of our interferometers (ΔL/L = 2.8 × 10−11). Both measures make the influence of frequency distortions on the interferometric length measurement within the NPMM-200 negligible. Furthermore, this approach establishes a permanent link of interferometric length measurements to an atomic clock.

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The NPMM-200: large area high resolution for freeform surface measurement

Cited by 3 publications

References 7 publications

Injection Molding of Encapsulated Diffractive Optical Elements

Injection Molding of Encapsulated Diffractive Optical Elements

Development of a Novel Multifunctional Abbé-free 12"-Wafer Measuring Stage for Semiconductor Manufacturing

A GPS-Referenced Wavelength Standard for High-Precision Displacement Interferometry at λ = 633 nm

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