The Planar Multipole Resonance Probe: Challenges and Prospects of a Planar Plasma Sensor

Schulz, Christian; Styrnoll, Tim; Awakowicz, Peter; Rolfes, Ilona

doi:10.1109/tim.2014.2358111

Cited by 38 publications

(46 citation statements)

References 25 publications

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“…They represent the proportional relations between the resonance and the plasma frequency, which are required to determine the electron density from a measured resonance. They are in good agreement with the CST simulations presented in [29] for the chosen probe and plasma parameters. As presented in ref.…”

Section: Converged Spectra Of the Pmrpsupporting

confidence: 86%

“…In former works about the pMRP its general performance was shown by CST simulations and measurements [28,29]. However, an analytic model of the probe-plasma system to determine a simple relation between the measured resonance frequency and Fig.…”

Section: Consequences Of Symmetry In Mrp and Pmrp Designmentioning

confidence: 99%

“…All other parameters are given by the geometry of the probe or the plasma itself and influence just the position of the resonance. In order to compare the determined spectra, we choose parameters of the pMRP taken from a recent published paper [29]: R S = 3 mm, d = 0.4 mm, ε D = 3.55, δ = 0.3 mm, ω pe = 2π · 2.8 · 10 9 s −1 and ν = 0.015ω pe . Figure 4 shows four different spectra to demonstrate the influence of R ∞ for 5 (bold orange line), 10 (dashed red line), 20 (dot-dashed blue line), and 40 (dotted black line) times the probe radius R S .M max = 10 and N max = 200 are set to large numbers, to focus only on the influence of R ∞ .…”

Section: Converged Spectra Of the Pmrpmentioning

confidence: 99%

“…As presented in ref. [29], the different probe radii are required to cover different frequency ranges. Within these ranges the relation between the plasma frequency f p and the measured resonance frequency f r are plotted in Fig.…”

Section: Converged Spectra Of the Pmrpmentioning

confidence: 99%

“…A more detailed investigation is presented in ref. [29], where the influence of the electrode radius was analyzed. The simulation results show, that a certain radius has to be chosen to cover a specific frequency range.…”

Section: Introductionmentioning

confidence: 99%

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The planar Multipole Resonance Probe: a functional analytic approach

Friedrichs

Oberrath

2018

EPJ Techn Instrum

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Active Plasma Resonance Spectroscopy (APRS) is a well known diagnostic method, where a radio frequency probe is immersed into a plasma and excites plasma oscillations. The response of the plasma is recorded as frequency dependent spectrum, in which resonance peaks occur. By means of a mathematical model plasma parameters like the electron density or the electron temperature can be determined from the detected resonances. The majority of all APRS probes have in common, that they are immersed into the plasma and perturb the plasma due to the physical presence of the probe. Thus, they are invasive and can at least influence the homogeneity of the plasma. To overcome this problem, the planar Multipole Resonance Probe (pMRP) was invented, which can be integrated into the chamber wall of a plasma reactor. Within this paper, the first analytic model of the pMRP is presented, which is based on a cold plasma description of the electrons. The general admittance of the probe-plasma system is derived by means of functional analytic methods and a complete orthonormal set of basis functions. Explicit spectra for an approximated admittance including a convergence study are shown. The determined resonance frequencies are in good agreement with former simulation results.

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Section: Converged Spectra Of the Pmrpsupporting

confidence: 86%

Section: Consequences Of Symmetry In Mrp and Pmrp Designmentioning

confidence: 99%

Section: Converged Spectra Of the Pmrpmentioning

confidence: 99%

Section: Converged Spectra Of the Pmrpmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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The planar Multipole Resonance Probe: a functional analytic approach

Friedrichs

Oberrath

2018

EPJ Techn Instrum

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Comparison of Helical and Helicon Antennas as Sources of Plasma Excitation Using a Full Wave 3D Electromagnetic Analysis in Vacuum

Stratakos

Zeniou

Gogolides

2016

Plasma Processes & Polymers

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Helical and Helicon antennas are routinely used to generate inductively coupled plasmas, but there are only a few simulations or experimental data with comparisons among them. Thus, selection of the appropriate number of turns, or the type of helical or helicon antenna to use is empirical. In this paper, a comparison via simulation of various helixes and helicon antennas is presented. Full wave 3D electromagnetic analysis is performed in vacuum using a commercial software, and the electric/magnetic field component is calculated and compared for four cases of helixes, namely N = 1–4 where N is the number of turns that each helix has, as well as two helicon antennas (half and full Nagoya type). In order to reduce the capacitive coupling of these antennas an electromagnetic shield is also applied. Simulation and comparison of the shielded and unshielded antennas is given. We show that via such simulations electric and magnetic field components can be compared in order to select the appropriate antenna type for a plasma source.

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