“…26 This thin interfacial layer model has been successfully utilized earlier to explain the high leakage current in SiC Schottky barrier diodes. 27,28 At a reverse bias of 100 V, a reverse current density of 3.5 × 10 -3 , 2.2 × 10 -3 , 1.0 × 10 -4 , and 2.5 × 10 -6 A/cm 2 was observed for the control, the CF 4 /O 2 , the CHF 3 /O 2 , and the CHF 3 /CF 4 devices, respectively. The reverse leakage current is highest for the control and improves significantly for both CHF 3 /O 2 and CHF 3 /CF 4 etched diodes as shown in Fig.…”