2008
DOI: 10.1016/j.surfcoat.2008.01.038
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The preparation of calcium phosphate coatings on titanium and nickel–titanium by rf-magnetron-sputtered deposition: Composition, structure and micromechanical properties

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Cited by 110 publications
(43 citation statements)
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“…For example, the deposition rate was found to increase with increasing Ar gas pressure up to 2 Pa but decreased significantly as the pressure increased up to 5 Pa, while the Ca/P ratios of as-deposited coatings decreased significantly at the higher Ar gas pressures [297]. Variations of negative substrate bias, deposition time and RF power were found to lead to variations in the Ca/P ratio from 1.53 to 3.88 and either crystalline or amorphous structure of the deposits [237]. A good schematic setup of a magnetron sputtering system is available in literature [30,146,148].…”
Section: Accepted Manuscriptmentioning
confidence: 89%
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“…For example, the deposition rate was found to increase with increasing Ar gas pressure up to 2 Pa but decreased significantly as the pressure increased up to 5 Pa, while the Ca/P ratios of as-deposited coatings decreased significantly at the higher Ar gas pressures [297]. Variations of negative substrate bias, deposition time and RF power were found to lead to variations in the Ca/P ratio from 1.53 to 3.88 and either crystalline or amorphous structure of the deposits [237]. A good schematic setup of a magnetron sputtering system is available in literature [30,146,148].…”
Section: Accepted Manuscriptmentioning
confidence: 89%
“…The authors concluded that the nanohardness and the Young's modulus of the CaPO 4 deposits themselves were ~ 10 GPa and ~ 110 GPa, respectively. They also found that the nanohardness value decreased when the indenter penetration depth increased, a phenomenon known as indentation size effect[237]. The numeric values of nanohardness of 3.4 -4 GPa and the Young's modulus of 122 -150 GPa were measured in other studies[229,747].…”
mentioning
confidence: 90%
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“…However, radio frequency (RF) magnetron sputtering is a physical deposition method that allows fabrication of thin, dense and well-adherent coatings with desired chemistry and crystallinity. A substantial amount of work has been done on RF magnetron sputtered CaP coatings on titanium and its alloys [15][16][17]. However, to the best of the authors' knowledge, there has been no reported literature on the biodegradation behaviour of RF magnetron sputtered CaP coating on magnesium or its alloys.…”
Section: Introductionmentioning
confidence: 99%
“…Hydroxyapatite (HA, Ca 10 (PO 4 ) 6 (OH) 2 ) has been widely used as a coating material for dental and orthopedic implants for many years, due to its close similarity of chemical composition and structure, as well as high biocompatibility with natural bone tissue [1][2][3]. Various deposition techniques have been used to deposit HA coating on metal implant, like magnetron sputtering [4,5], plasma spray processing technique [6,7], pulsed laser deposition [8], ion beam deposition [9], hydrothermal reactions or electrophoretic deposition [10,11], sol-gel [12], and biomimetic techniques [13,14]. Among them, electrochemical methods get the most attention due to their numerous advantages, like operation at low temperature, possibility to coat complex shapes, easily controlled the coating thickness and the process relatively inexpensive.…”
Section: Introductionmentioning
confidence: 99%