The processing technology and electronic packaging of CVD diamond: a case study for GaAs/CVD diamond plastic packages

Fabis, P. M.

doi:10.1016/s0026-2714(01)00242-6

Cited by 6 publications

(5 citation statements)

References 24 publications

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“…141 [55] 551 [56] 950 (double layer, MPACVD) [57] 1000 [58] 700-2100 [49] 1000-1500 [59] 1200-1500 (HFCVD) and 1400 (MPACVD) [46] 1000-2000 (varying with film quality) [60] CVD diamond (NCD film) certain environmental conditions. By using a mixture of hydrocarbon gas in excess of hydrogen gas under pressures below of atmospheric, with an energy source for gas dissociation and subsequent reaction, carbon condensate to solid state enabling diamond crystals growth and then multiple growth nuclei coalescence form a continuous film over a surface [66].…”

Section: Cvd Diamond Heat Sinksmentioning

confidence: 99%

“…Dielectric surface roughness can also aggravate the conductor roughness due to conformal nature of the metallization process. The thinning and polishing of the diamond piece is then of great importance to reduce the thermal conductivity of the affected region and smoothing of the film surface to promote better contact between pieces [12,59].…”

Section: Polishingmentioning

confidence: 99%

“…The process of adding a metallic layer to CVD diamond films, metallization, are conducted by several different systems, most employing a refractory metal adhesion layer which when deposited under appropriate conditions, forms an interfacial refractory metal-carbide phase. Some metallization systems are based on processing noble metal surface chemistry or ion beam surface chemistry to provide a "near surface" chemically and structurally modified diamond suitable for non-refractory bonding metallurgies [59].…”

Section: Metallizationmentioning

confidence: 99%

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Development, Properties, and Applications of CVD Diamond-Based Heat Sinks

Neto¹,

Fraga²,

Trava-Airoldi³

2020

Some Aspects of Diamonds in Scientific Research and High Technology

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Heat sink is an essential component to nanoelectronics, microelectronics, and optoelectronics applications because it allows the thermal management of devices such as integrated circuits (ICs), microelectromechanical systems (MEMSs), and graphic unit processing. There are different materials being employed for heat sink production. Among them, diamond has stood out due to its excellent chemical and physical properties. This book chapter focuses on the development, properties, and applications of CVD diamond heat sinks. It covers the basic concepts of heat conduction applied to CVD diamond as a heat sink material and its production as freestanding CVD wafers of polycrystalline CVD diamond, since the literature about this topic is extensive, giving the reader a comprehensive overview. We will comprise the use and potential widening of applications of in CVD diamond heat sink technology, providing the reader with a substantial background at the current development of solutions and new frontiers in the practical use of CVD diamond thermal management devices.

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Section: Cvd Diamond Heat Sinksmentioning

confidence: 99%

Section: Polishingmentioning

confidence: 99%

Section: Metallizationmentioning

confidence: 99%

See 1 more Smart Citation

Development, Properties, and Applications of CVD Diamond-Based Heat Sinks

Neto¹,

Fraga²,

Trava-Airoldi³

2020

Some Aspects of Diamonds in Scientific Research and High Technology

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Section: Polishingmentioning

confidence: 99%

“…Similarly boron or nitrogen in the precursor gases [46] make the diamond blue [47] or yellow [48][49][50] in colour due to the substitutional atomic defects [51,52] introduced in the diamond lattice [53,54]. Such substitutional defects are studied by [55] photoluminescence (PL) [56][57][58], Fourier transform infra-red (FTIR) spectroscopy techniques [59], whereas the point, line, plane or volume defects during CVD growth can be viewed under transmission electron microscopes (TEM) [60][61][62][63][64][65][66][67][68]. Post-processing steps such as annealing [69,70] may be required to remove some of these defects [71].…”

Section: Introductionmentioning

confidence: 99%

Some Aspects of Diamonds in Scientific Research and High Technology

Lipatov¹

2020

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The electrical properties of diamond are significantly affected by the charge of the surface states of the sample. Depending on the type of chemisorbed elements, the electronic affinity of the diamond surface is changeable [36, 37]. The detection of negative electron affinity of the diamond surface (downward bending of zones, the absence of a potential barrier) determined the studies on the creation of cold cathodes and electron emitters based on diamond coatings [38].Due to the strong covalent bonds, diamond is a chemically inert material and is suitable for medical and biotechnological applications [10]. In this case, such diamond properties as low cost of nanoparticles, the possibility of surface activation by photochemical methods, high photoluminescence yield and its resistance to photobleaching, low cytotoxicity, and, as a consequence, environmental safety are used.The collection of scientific chapters proposed to the reader reflects some of the aspects, mentioned above. This collection will be useful to students, graduate students, and researchers who are interested in such disciplines as the synthesis of carbon and superhard materials, carbon electronics and photonics, surface chemistry, etc.

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