1977
DOI: 10.1016/0040-6090(77)90319-4
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The properties of fluorocarbon films prepared by r.f. sputtering and plasma polymerization in inert and active gas

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Cited by 88 publications
(28 citation statements)
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“…The attempts to prepare fluorocarbon polymer‐like films can be dated back to the end of the sixties and continued until the beginning of eighties 1–9. The targeted applications were low friction coatings, excellent dielectric films and optical coatings 1, 2, 6. Later, an interest in these films slumped, but was then renewed at the beginning of the nineties by the study of Marechal and Pauleau 10.…”
Section: Introductionmentioning
confidence: 99%
“…The attempts to prepare fluorocarbon polymer‐like films can be dated back to the end of the sixties and continued until the beginning of eighties 1–9. The targeted applications were low friction coatings, excellent dielectric films and optical coatings 1, 2, 6. Later, an interest in these films slumped, but was then renewed at the beginning of the nineties by the study of Marechal and Pauleau 10.…”
Section: Introductionmentioning
confidence: 99%
“…The sputtered fl uorocarbon layers typically show a low absorption index ( k ≈ 0.001) (Neubert et al ., 2011a), low refractive index ( n = 1.35 to 1.48 (Biederman et al ., 1977)) and high hydrophobicity (water contact angle of about 120° and greater) (Kyli á n et al ., 2011). For the deposition a magnetron sputter deposition chamber with a PTFE plate as sputter target can be used ( Fig.…”
Section: Rf Sputteringmentioning
confidence: 97%
“…Normally molecular chains are broken, leading to layers with an amorphous, undefi ned structure on the substrate. However, there are some reports of sputtered polymer layers like polytetrafl uoroethylene (PTFE) (Pratt and Lausman, 1972;Morrison and Robertson, 1973;Biederman et al ., 1977;, polyimide (PI) , polypropylene (PP) (Stelmashuk et al ., 2004) and polyethylene (PE) Kousal et al ., 2005). The deposited layers are structurally not identical to the polymer source materials but they basically consist of shorter fragments of the original material with strong cross linking .…”
Section: Rf Sputteringmentioning
confidence: 98%
“…Sputtered coatings generally have the same composition as the target. For example, sputtered organic bone (29) has the same composition as the starting material, and polytetrafluoroethylene (PTFE) likewise produces films having many of the properties of the starting material (30)(31)(32)(33).…”
Section: Sputteringmentioning
confidence: 99%