Appl. Phys. A
 1988
DOI: 10.1007/bf00939267
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The radiation hardness property of dry oxide grown by postoxidation cooling in oxygen ambient

Jenn–Gwo Hwu
1
,
Shyh-Liang Fu
2
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Cited by 7 publications
(1 citation statement)
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“…3'. It is believed that the excess oxygen releases some of the interracial strain and therefore hardens the oxide [15]. However, the release of interfacial strain due to excess oxygen is not so efficient as that by successive irradiation-then-anneal treatments.…”
Section: Methodsmentioning
confidence: 99%

Improvement in radiation hardness of oxide by successive irradiation-then-anneal treatments

Hwu
1
,
Fu
2
1989
Solid-State Electronics
Self Cite
17
0
7
0
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“…3'. It is believed that the excess oxygen releases some of the interracial strain and therefore hardens the oxide [15]. However, the release of interfacial strain due to excess oxygen is not so efficient as that by successive irradiation-then-anneal treatments.…”
Section: Methodsmentioning
confidence: 99%

Improvement in radiation hardness of oxide by successive irradiation-then-anneal treatments

Hwu
1
,
Fu
2
1989
Solid-State Electronics
Self Cite
17
0
7
0
View full textAdd to dashboardCite

Reduction of the radiation sensitivity of MOS structures by irradiation-anneal cycle treatment

Kaschieva
1
1993
Nuclear Instruments and Methods in Physics Research Section B:
3
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1
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Use of X-ray irradiation for annealing of radiation defects introduced by ion implantation in Si–SiO2 structures

Kaschieva
1
,
Yourukov
2
1998
Solid-State Electronics
4
0
0
0
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