1982
DOI: 10.1002/anie.198204553
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The Resist Technique—A Chemical Contribution to Electronics

Abstract: Dedicated to Professor Klaus Weissermel on the occasion of his 60th birthdayBesides its technical meaning, the word "electronics" signifies another industrial revolution. The driving force behind this development is the very rapid progress in the field of integrated semiconductor circuits. An ever-increasing number of structures of ever-decreasing size must be accommodated on the same surface of the semiconductor crystal. This trend towards miniaturization embraces not only the integrated circuit but also its … Show more

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Cited by 26 publications
(8 citation statements)
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“…Carbenes are important intermediates in a variety of chemical reactions and have therefore been extensively studied both experimentally and theoretically . Carbenes have low-lying singlet and triplet states and, because their reactivity is state-specific, the magnitude of the singlet−triplet (S−T) splitting is of great importance and has received particular attention. , Carbonyl carbenes (YC−CO−X) are widely used in synthesis and in industry as photoresists . A key reaction that singlet carbonyl carbenes can undergo is the Wolff rearrangement, leading to the production of a ketene:
…”
Section: Introductionmentioning
confidence: 99%
“…Carbenes are important intermediates in a variety of chemical reactions and have therefore been extensively studied both experimentally and theoretically . Carbenes have low-lying singlet and triplet states and, because their reactivity is state-specific, the magnitude of the singlet−triplet (S−T) splitting is of great importance and has received particular attention. , Carbonyl carbenes (YC−CO−X) are widely used in synthesis and in industry as photoresists . A key reaction that singlet carbonyl carbenes can undergo is the Wolff rearrangement, leading to the production of a ketene:
…”
Section: Introductionmentioning
confidence: 99%
“…Thermal and photochemical rearrangements of α-diazocarbonyl compounds to ketenes (Wolff rearrangement) have received considerable attention because of their relevance to both fundamental science and applied technology. In synthetic organic chemistry, the Wolff rearrangement represents the key step in the Arndt−Eistert sequence for the one-carbon homologation of carboxylic acids. The rearrangement also serves as an excellent method for effecting ring contraction and is notable for its success in forming strained rings. , Recent applications of the Wolff rearrangement involve the use of α-diazo ketones as photochemically triggered DNA-cleaving reagents. , The most important application of the Wolff rearrangement derives from the use of α-diazocarbonyl compounds in computer circuit microfabrication. …”
Section: Introductionmentioning
confidence: 99%
“…[25][26][27][28] The same polymers as above with only the azide groups have been utilized as photoresists in high resolution lithography. 29,30 In this contribution the chemistry of azide-functionalized copolymers 30 has been adapted to synthesize random copolymers for thin dielectrics for organic FETs which do not show the above addressed problems and are easy to process. Synthesis and characterization of two benzyl azide-containing random copolymers, named PAZ 12 and PAZ 14, and their applicability as thin gate insulator in OFETs are presented.…”
Section: Introductionmentioning
confidence: 99%