2015
DOI: 10.1016/j.mee.2014.10.021
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The role of copper pretreatment on the morphology of graphene grown by chemical vapor deposition

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Cited by 24 publications
(14 citation statements)
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“…Apparently, the AR-Cu has a really rough surface with the root mean square (RMS) roughness of 20.30 nm. As reported, both thermal annealing and electro-polishing can effectively smoothen the surface [ 12 , 18 , 27 , 37 ], reducing the surface roughness to 5.62 nm and 4.27 nm, respectively. In addition, a combination of thermal annealing and electro-polishing, i.e., either thermal annealing after electro-polishing or electro-polishing after thermal annealing, can further reduce the surface roughness to 2.01 nm and 0.80 nm, respectively.…”
Section: Resultsmentioning
confidence: 93%
“…Apparently, the AR-Cu has a really rough surface with the root mean square (RMS) roughness of 20.30 nm. As reported, both thermal annealing and electro-polishing can effectively smoothen the surface [ 12 , 18 , 27 , 37 ], reducing the surface roughness to 5.62 nm and 4.27 nm, respectively. In addition, a combination of thermal annealing and electro-polishing, i.e., either thermal annealing after electro-polishing or electro-polishing after thermal annealing, can further reduce the surface roughness to 2.01 nm and 0.80 nm, respectively.…”
Section: Resultsmentioning
confidence: 93%
“…The catalyst plays an important role in the CVD process. We generally use Cu [5,24,25], Ni [6,23], Pd [49], Ru [57], and Ir [58], as the metal base material for the preparation of graphene. As we know, different metal base materials have a different effect on the preparation of graphene, so the metal substrate is the key factor to determine the growth of graphene.…”
Section: Choice Of Metal Base Materialsmentioning
confidence: 99%
“…Compared with other methods, such as mechanical exfoliation of graphite [12][13][14], liquid-phase exfoliation [15,16], and reduction of graphene oxide (GO) [17,18], chemical vapor deposition (CVD) is regarded as the most promising way for large-scale graphene production at a large scale with low defects, good uniformity, and controlled number of graphene layers, which has attracted intense research attention during the last decades [19][20][21][22]. CVD involves the activation of gaseous reactants and the subsequent chemical reaction, followed by the formation of a stable solid deposit over a suitable substrate such as Ni [6,23], Cu [5,24,25], Fe [26], Pt [27,28], or their alloys [29,30]. As early as 1969, Robertson et al [31] discovered that chemical vapor deposition in the presence of methane produces a layer of graphite on some transition metal surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…The copper foil is initially cleaned with solvents, electrochemically polished and then annealed at a high temperature to remove impurities. The detailed growth condition and structural information of the CVD graphene can be found elsewhere [20]. Since the graphene sample size is larger than the CPW signal-ground spacing, an additional exposure is implemented so that the unwanted graphene is trimmed by plasma cleaning.…”
Section: B Test Device Fabricationmentioning
confidence: 99%