Chemical Vapor Deposition for Nanotechnology 2019
DOI: 10.5772/intechopen.79959
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Large-Area Synthesis and Growth Mechanism of Graphene by Chemical Vapor Deposition

Abstract: There has been continuous progress in the development of different synthesis methods to readily produce graphene at a lower cost. Compared with the other methods, chemical vapor deposition (CVD) is an effective and powerful method of producing graphene and has attracted increased attention during the last decade. In this way, we can obtain good uniformity with a multitude of domains, excellent quality, and large scale of the produced graphene. Meanwhile, it is also helping for large-area synthesis of single-cr… Show more

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Cited by 16 publications
(25 citation statements)
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“…Graphene is commonly produced by exfoliation from graphite [28,29], epitaxial growth on SiC [30] or chemical vapor deposition (CVD) [31,32]. In particular, CVD produces uniform and large-scale graphene flakes of high-quality and is compatible with the silicon technology; therefore, it has been largely exploited to realize new electronic devices such as diodes [33][34][35][36], transistors [37][38][39], field emitters [40,41], chemical-biological sensors [42,43], optoelectronic systems [44], photodetectors [45][46][47][48][49][50] and solar cells [51].…”
Section: Introductionmentioning
confidence: 99%
“…Graphene is commonly produced by exfoliation from graphite [28,29], epitaxial growth on SiC [30] or chemical vapor deposition (CVD) [31,32]. In particular, CVD produces uniform and large-scale graphene flakes of high-quality and is compatible with the silicon technology; therefore, it has been largely exploited to realize new electronic devices such as diodes [33][34][35][36], transistors [37][38][39], field emitters [40,41], chemical-biological sensors [42,43], optoelectronic systems [44], photodetectors [45][46][47][48][49][50] and solar cells [51].…”
Section: Introductionmentioning
confidence: 99%
“…Chemical vapour deposition (CVD) is one of the most popular way and widely used in forming monolayered graphene and producing relatively high-quality graphene in large scale production. Typically, CVD is a simple chemical reaction process that uses carbon source (gas, liquid, or solid) and decomposes at high-temperature condition, in which resulted in carbon atoms in the metal surface which eventually is graphene membrane [36]. Besides, the deposition method comprises homogeneous gas-phase reaction and chemical reaction.…”
Section: Chemical Vapour Deposition (Cvd) Methodsmentioning
confidence: 99%
“…The chemical vapour deposition technique has recently received considerable attention because of the large-scale graphene synthesis with controlled architecture and low defects [ 173 , 174 , 175 , 176 ]. The CVD technique encompasses four main stages: (i) activation of feed gases, (ii) chemical reaction, (iii) formation of graphene nanomaterials, and (iv) deposition on a suitable substrate.…”
Section: Production Process Of Graphene-based Materialsmentioning
confidence: 99%