The role of Laplace pressure in the formation of the structure of thin layers based on silicon dioxide

Effect of preliminary VUV irradiation on the reactivity of alkyl-doped silicon dioxide layers

“…In turn, this may serve as a confirmation of the correctness of our assumption that the excess energy gets distributed over the lattice. Comparing the results obtained in the present work with the data reported in [24], we may say that at the depth of 200 nm the temperature of annealing, achieved due to UV irradiation and energy redistribution, is equivalent to 200-250°C. The pore size distribution after plasma treatment and etching of the layers with small pores (1.1 nm) is shown in Fig.…”

“…Such behaviour is similar to thermal annealing; a decrease in pore radius can be explained by the action of Laplacian forces. The mechanism of this process was described in [24]. In turn, this may serve as a confirmation of the correctness of our assumption that the excess energy gets distributed over the lattice.…”

Effect of UV radiation on the reactivity of porous methyl‐doped SiO2 layers

“…This, in turn, may serve as a confirmation of the correctness of our assumption that the excess energy is redistributed over the lattice. Comparing the results obtained in the present work with the data reported in [11], we may state that the annealing temperature at a depth of 200 nm, achieved as a consequence of UV irradiation and energy redistribution, is equal to 250 o C. Figure 2 (curve 2) shows the distribution of micropores over radius after treatment in plasma and etching. It is interesting that the pores of larger radius (R ~ 2 nm) are displayed after etching, though the pores of this radius were not detected in the initial film.…”

“…Such a behaviour is similar to thermal annealing; a decrease in pore radius may be explained by the action of Laplacian forces. The mechanism of this process was described in [11]. This, in turn, may serve as a confirmation of the correctness of our assumption that the excess energy is redistributed over the lattice.…”