Superconducting YBa 2 Cu 3 O 7-x (YBCO) films were prepared using an ultralow-fluorine sol with F/Ba = 2, which was synthesized using fluorine-contained barium trifluoroacetate (Ba-TFA), and fluorine-free yttium, barium, and copper salts. The mole ratio of F/Ba = 2 was realized in the sol by controlling the content of Ba-TFA. During the pyrolysis process, the fluorine-free and fluorine-contained Ba-salts were found to be completely converted to BaF 2 phase, and almost no corrosive fluorinated gases (such as HF gas) were released out of the film, resulting in the film with smooth surface even under a high heating rate of 10-15°C/min. Single-coated YBCO film (*280 nm) with critical current density (J c ) of 5 MA/cm 2 (77 K, 0 T), and double-coated film (*550 nm) with J c over 3.5 MA/cm 2 (77 K, 0 T) were obtained on LaAlO 3 single crystal substrates. Compared with YBCO films deposited from solutions with higher fluorine content, the ultralow-fluorine solgel deposited YBCO films showed comparable superconductivity, but improved surface quality and production rate.