2007
DOI: 10.1016/j.tsf.2007.03.028
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The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatment

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Cited by 20 publications
(17 citation statements)
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“…The water contact angle of PEG–silane modified glass surface was measured to be 34 ± 1°. These results are comparable with previously reported values for HMDS and PEG monolayer 22,29,30. In order to evaluate the effects of the PEG passivation procedure on HMDS monolayer, the glass substrate fully covered with HMDS monolayer was incubated in the PEG passivation solution for 24 h. The water contact angle was measured after the sample has been thoroughly rinsed and dried.…”
Section: Resultssupporting
confidence: 89%
“…The water contact angle of PEG–silane modified glass surface was measured to be 34 ± 1°. These results are comparable with previously reported values for HMDS and PEG monolayer 22,29,30. In order to evaluate the effects of the PEG passivation procedure on HMDS monolayer, the glass substrate fully covered with HMDS monolayer was incubated in the PEG passivation solution for 24 h. The water contact angle was measured after the sample has been thoroughly rinsed and dried.…”
Section: Resultssupporting
confidence: 89%
“…The cause of this deterioration has often been attributed to the absorption of airborne contaminants and overall water vapour in the film pores, leading to an increase in the refractive index [8][9][10][11]. Additionally, it has been reported that, this adsorption degrades not only the optical properties but also the electrical properties of porous silica films [12,13]. On the other hand, some authors have found another deterioration process due to a slow diffusion process of Ca 2+ ions from the glass to the surface that leads to CaCO 3 formation on coating surface [14].…”
Section: Durability Of Antireflective Filmsmentioning
confidence: 99%
“…17,18 Through condensation reaction, HMDS can react with the surface hydroxyl (eOH) groups to form a monolayer of siloxane (i.e., SieOeSi(CH 3 ) 3 ) through the following reaction:…”
Section: Resultsmentioning
confidence: 99%