2019
DOI: 10.1051/itmconf/20193007002
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The study of the mechanical properties of thin films using piezoceramic acoustic resonators

Abstract: The paper describes a method for determining the properties of thin films: elastic constants, viscosity and density. The method is based on the analysis of changing the characteristics of the acoustic resonator, on the surface of which the film under study is deposited, in comparison with a free resonator. Using the described method, the properties of two organic films based on the mycelium of basidiomycete Hericium erinaceus (Bull.) Persoon were determined.

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Cited by 6 publications
(7 citation statements)
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“…In this case, the density of piezoceramics was determined previously based on the mass and the volume of the resonator. Subsequently, by fitting the indicated theoretical dependencies to the experimental ones, the refined material constants of piezoceramics were determined while using the Nelder-Mead algorithm [26,27]. Afterward, the studied film was deposited on one side of the resonator directly onto the electrode, and the measurement of the frequency dependence of the electric impedance module was repeated.…”
Section: Determination Of the Elastic And Viscosity Coefficients Of Chitosan Filmsmentioning
confidence: 99%
“…In this case, the density of piezoceramics was determined previously based on the mass and the volume of the resonator. Subsequently, by fitting the indicated theoretical dependencies to the experimental ones, the refined material constants of piezoceramics were determined while using the Nelder-Mead algorithm [26,27]. Afterward, the studied film was deposited on one side of the resonator directly onto the electrode, and the measurement of the frequency dependence of the electric impedance module was repeated.…”
Section: Determination Of the Elastic And Viscosity Coefficients Of Chitosan Filmsmentioning
confidence: 99%
“…It is also known that the mechanical and electrical properties of films can be determined using acoustic methods. For example, to determine the elastic modulus, viscosity coefficient, and density of thin films, piezoelectric resonators with a longitudinal electric field can be used [ 3 , 4 , 5 , 6 , 7 , 8 ]. This resonator represented a piezoelectric disk with electrodes on each side, and the film under study was deposited on one of these electrodes.…”
Section: Introductionmentioning
confidence: 99%
“…Then, by fitting the theoretical frequency dependencies of the impedance to the experimental ones, the modulus of elasticity, the viscosity coefficient, and the density of thin films were determined. This method was used to study the mechanical properties of silicon dioxide films [ 3 ], nanocomposite films based on low-pressure polyethylene [ 4 ], mycelial films [ 5 , 6 , 7 ], and chitosan films [ 8 , 9 ] in the presence of various gases. There is also an approach in which surface acoustic waves are used to determine the mechanical properties of films [ 10 ].…”
Section: Introductionmentioning
confidence: 99%
“…At this stage, a finite element model of the resonator was created, and the characteristics of the material (elastic, piezoelectric and dielectric constants, density, and viscosity) of the resonator itself were refined [ 10 , 11 ]. This was done by the method of broadband acoustic resonance spectroscopy [ 10 , 11 , 12 ]. Then, these measurements were carried out in the same frequency range for the resonator, the free surface of which was in contact with the investigated medium.…”
Section: Introductionmentioning
confidence: 99%
“…This medium can be a viscoelastic film with finite conductivity or viscous conducting liquid. By changing the values of the resonance frequencies and the magnitude of the resonance peaks, one can estimate the properties of the medium under study [ 12 ]. In order to determine the mechanical and electrical properties of the medium, the electric field that accompanies acoustic oscillations must freely penetrate from the resonator into the medium.…”
Section: Introductionmentioning
confidence: 99%