Applied Science and Convergence Technology
 2015
DOI: 10.5757/asct.2015.24.4.90
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The Study on the Precursor Adsorption using in-situ Nanoparticle-assisted Attenuated Total Reflectance Infrared Spectroscopy

Jae-Suk Shin1,
Myungsu Park2,
Won-Jun Jung3
et al.
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