The Surface Acoustic Wave Properties of Proton Exchanged YZ Lithium Niobate

Hickernell, F.S.; Ruehle, K. D.; Joseph, Shay; Reese, Garth M.; Weller, J. F.

doi:10.1109/ultsym.1985.198510

Cited by 21 publications

(12 citation statements)

References 7 publications

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“…Immersion of material into molten proton sources result in the exchange by protons, and a new crystalline structure is established [1][2][3][4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Temperature Coefficient of SAW Device on SiO₂/Proton Exchanged LiNbO₃Substrate

et al. 2004

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Proton exchange (PE) is an attractive method for the fabrication of optical and acoustic waveguides in lithium niobate (LiNbO 3 ). LiNbO 3 substrate has large electromechanical coupling coefficient (K 2 ) and moderate SAW velocity, but its temperature coefficient of frequency (TCF) is as large as −73 ppm/ • C. Silicon dioxide (SiO 2 ) is a well-known non-piezoelectric material having the positive TCF for SAW. The SiO 2 thin films are deposited on the PE-LiNbO 3 substrates to improve the TCF of the SAW devices. The results show that the temperature stability of SAW on SiO 2 /PE-LiNbO 3 substrate is improved to be about −55 ppm/ • C.

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“…Immersion of material into molten proton sources result in the exchange by protons, and a new crystalline structure is established [1][2][3][4][5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Temperature Coefficient of SAW Device on SiO₂/Proton Exchanged LiNbO₃Substrate

et al. 2004

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“…It has been reported that proton exchange caused a deterioration in piezoelectricity but that a subsequent annealing partially restored the degraded piezoelectric property [9]. The good agreement of the experimental with the theoretical results suggests that the piezoelectricity of the proton-exchanged layer might be almost completely restored during the heat-treatment process.…”

Section: Phase Velocity and Coupling Factormentioning

confidence: 52%

Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates

Nakamura

Tourlog

1994

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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The temperature coefficient of delay of the SH-type surface acoustic wave on 36 degrees Y-X LiTaO(3) substrates with a ferroelectric inversion layer is theoretically analyzed and it is shown that the temperature characteristics can be improved by an electric-field short-circuiting effect of the domain boundary. The experimental results of the temperature coefficient of delay agree well with the theoretical. The minimum value of measured temperature coefficients of delay is 12.6 ppm/ degrees C for the metallized surface case, which is about one-third of that in a 36 degrees Y-X substrate with no inversion layer. Experimental results on the phase velocity and the electromechanical coupling factor of the SH-type surface acoustic wave are also presented and compared with the theoretical.

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“…In rotated Y-cut LN substrates, the LSAW coupling coefficient increases as the Y-axis is approached [1], and hence we used 10° Y-X LN. A buried PE layer formed inside the substrate by the RPE process is known not only to reduce the elastic constant below that of the bulk LN but also to decrease the piezoelectric constant [12]. Thus, we first analyzed how LSAW propagation characteristics change with a decrease of the substrate's elastic constant for various values of the piezoelectric constant, density, and permittivity.…”

Section: Introductionmentioning

confidence: 99%

Propagation properties of leaky surface acoustic wave on reverse‐proton‐exchanged 10° Y‐X LiNbO₃

Kakio

Shimizu

Nakagawa

2012

Elect Comm in Japan

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In this study, to reduce leaky surface acoustic wave (LSAW) attenuation, a layered structure of air/bulk LiNbO 3 (LN) layer/elastically softened LN substrate which can be fabricated by a reverse proton exchange (RPE) process was applied to 10° Y-X LN with a larger coupling factor. First, the LSAW attenuation on a structure of air/bulk LN/modified LN was calculated with all material constants of the buried proton exchange (PE) layer taken into consideration. It was found that a condition under which the attenuation decreases as compared with the bulk value exists for the free and metallized surfaces. Next, the LSAW propagation properties were measured using IDT pairs with a 3.6-µm wavelength on 10° Y-X LN with the RPE layer and the buried PE layer. The propagation loss PL for the metallized surface was decreased by carrying out the RPE process from 0.44 dB/λ of a virgin wafer to 0.01 dB/λ. The decrease in PL for the shorted grating was also observed.

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The Surface Acoustic Wave Properties of Proton Exchanged YZ Lithium Niobate

Cited by 21 publications

References 7 publications

Temperature Coefficient of SAW Device on SiO₂/Proton Exchanged LiNbO₃Substrate

Temperature Coefficient of SAW Device on SiO₂/Proton Exchanged LiNbO₃Substrate

Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates

Propagation properties of leaky surface acoustic wave on reverse‐proton‐exchanged 10° Y‐X LiNbO₃

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The Surface Acoustic Wave Properties of Proton Exchanged YZ Lithium Niobate

Cited by 21 publications

References 7 publications

Temperature Coefficient of SAW Device on SiO2/Proton Exchanged LiNbO3Substrate

Temperature Coefficient of SAW Device on SiO2/Proton Exchanged LiNbO3Substrate

Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates

Propagation properties of leaky surface acoustic wave on reverse‐proton‐exchanged 10° Y‐X LiNbO3

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About

Temperature Coefficient of SAW Device on SiO₂/Proton Exchanged LiNbO₃Substrate

Temperature Coefficient of SAW Device on SiO₂/Proton Exchanged LiNbO₃Substrate

Propagation properties of leaky surface acoustic wave on reverse‐proton‐exchanged 10° Y‐X LiNbO₃