The TiNi shape-memory alloy and its applications for MEMS

Kahn, H.; Huff, Michael; Heuer, A. H.

doi:10.1088/0960-1317/8/3/007

Cited by 259 publications

(106 citation statements)

References 78 publications

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“…Formula (23) shows that besides the amplitude modulation there is an additional frequency modulation. The amplitude modulation is due to the thermal shortening of the SMA wire.…”

Section: Fig 4 Temperature Deformation Vs Timementioning

confidence: 99%

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Modelling and Investigation of a Hybrid Thermal Energy Harvester

et al. 2018

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Abstract. The presented paper deals with dynamical and experimental investigations of a hybrid energy harvester containing shape memory alloy (SMA) wire and elastic cantilever with piezoelectric layer. The SMA wire periodically changes its temperature under the influence of a heated plate that approaches and moves away from the SMA wire. The change of SMA wire length causes rotation of the hot plate. The plate is heated by a heater with constant temperature. The repeated SMA wire extensions and contractions bend the piezoelectric cantilever which generates electric charges. The shape memory effect is presented as a temperature approximation of the Young's modulus. A dynamical model of the energy harvester is created and some analytical investigations are presented. With the help of an experimental setup the acceleration, the force, the temperature, and the output voltage have been measured. The theoretical results are validated experimentally. Some conclusions are made about the best performance of the energy harvester.

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“…Formula (23) shows that besides the amplitude modulation there is an additional frequency modulation. The amplitude modulation is due to the thermal shortening of the SMA wire.…”

Section: Fig 4 Temperature Deformation Vs Timementioning

confidence: 99%

“…SMA engines with continuous motion convert the reciprocating linear motion of an SMA actuator into continuous rotary motion [20][21][22]. Oscillating SMA engines consist of SMA elastic element (cantilever, bridge, wire) which moves between two end positions corresponding to heated and cooled state [23].…”

Section: Introductionmentioning

confidence: 99%

Modelling and Investigation of a Hybrid Thermal Energy Harvester

et al. 2018

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“…SMA actuators are known for offering higher work densities than any other MEMS actuator, of the order of 10 [39,40], and therefore have been applied in a wide range of micromechanical systems over the past decades [41]. However, similar to many other thermal actuators, thermal phase change actuators suffer from very long response times, ranging from tens of milliseconds to several seconds [34,42].…”

Section: Shape Memory Alloy Actuatorsmentioning

confidence: 99%

Design Considerations for a Micromachined Proportional Control Valve

et al. 2012

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Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

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“…TiNi-based SMA thin films, with their shape memory effect, pseudo-elasticity, biocompatibility, deformation compatibility and high damping capacity, have found applications in biomedical and microelectromechanical systems (MEMS) [1], Fu and Du [2], Fu et al [3][4][5][6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Cyclic Nanoindentation and Nano-Impact Fatigue Mechanisms of Functionally Graded TiN/TiNi Film

Faisal

Prathuru

Goel

et al. 2017

Shap. Mem. Superelasticity

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The mechanisms of nanoscale fatigue of functionally graded TiN/TiNi films have been studied using multiple-loading cycle nanoindentation and nano-impact tests. The functionally graded films were sputter deposited onto silicon substrates, in which the TiNi film provides pseudo-elasticity and shape memory behaviour, while a top TiN surface layer provides tribological and anti-corrosion properties. Nanomechanical tests were performed to investigate the localised film performance and failure modes of the functionally graded film using both Berkovich and conical indenters with loads between 100 lN and 500 mN. The loading history was critical to define film failure modes (i.e. backward depth deviation) and the pseudo-elastic/shape memory effect of the functionally graded layer. The results were sensitive to the applied load, loading mode (e.g. semi-static, dynamic) and probe geometry. Based on indentation force-depth profiles, depth-time data and post-test surface observations of films, it was concluded that the shape of the indenter is critical to induce localised indentation stress and film failure, and generation of pseudo-elasticity at a lower load range. Finite-element simulation of the elastic loading process indicated that the location of subsurface maximum stress near the interface influences the backward depth deviation type of film failure.

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The TiNi shape-memory alloy and its applications for MEMS

Cited by 259 publications

References 78 publications

Modelling and Investigation of a Hybrid Thermal Energy Harvester

Modelling and Investigation of a Hybrid Thermal Energy Harvester

Design Considerations for a Micromachined Proportional Control Valve

Cyclic Nanoindentation and Nano-Impact Fatigue Mechanisms of Functionally Graded TiN/TiNi Film

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