The tunable dielectric properties of sputtered yttrium oxide films

Lei, Pei; Rothenberg, Marc E.; Zhu, Jiaqi

doi:10.1007/s00339-021-04280-8

Cited by 7 publications

(2 citation statements)

References 44 publications

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“…Yttrium oxide (Y 2 O 3 ) has excellent physical and chemical properties, which mean that it is widely used in semiconductor devices, nuclear engineering, and optical applications [1][2][3][4][5][6][7][8]. As a rare earth oxide, the contact angle of water on the Y 2 O 3 surface can be above 90 • , providing a hydrophobic [9][10][11][12] or even a super-hydrophobic surface due to the special electronic structures [13,14].…”

Section: Introductionmentioning

confidence: 99%

Effects of the Deposition Mode and Heat Treatment on the Microstructure and Wettability of Y2O3 Coatings Prepared by Reactive Magnetron Sputtering

Huang

2022

Coatings

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A robust hydrophobic Y2O3 coating at high temperatures is important for industrial applications. In this study, Y2O3 thin films on Si substrates were prepared by reactive direct current magnetron sputtering. By changing the deposition power, Y2O3 thin films with different microstructures were obtained in poison mode and metallic mode, respectively. In order to understand the effect of heat treatment on the microstructure and hydrophobicity of Y2O3, the samples were annealed at 400 °C in the air. Compared to metallic mode, no crack was formed on the surface of the Y2O3 film prepared in poison mode. In addition, the water contact angle on the surface of the Y2O3 thin film deposited in poison mode was above 90° before and after annealing at 400 °C. It has been demonstrated that the initial high concentration of physically absorbed oxygen and its slow desorption process in a Y2O3 thin film prepared in poison mode contributes to the hydrophobicity of the thin film at high temperatures. These results can provide insights into the large-scale fabrication of hydrophobic Y2O3 coatings for high-temperature applications.

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Section: Introductionmentioning

confidence: 99%

Effects of the Deposition Mode and Heat Treatment on the Microstructure and Wettability of Y2O3 Coatings Prepared by Reactive Magnetron Sputtering

Huang

2022

Coatings

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“…Significant intensification of microwave absorption ability through the wall of an irradiated SiC crucible with a wave field can be obtained by coating the outer surface of crucible with thin layer of yttrium oxide (Y2O3) achieved by spraying. The dielectric properties of Y2O3 (tangent loss and dielectric constant) increase at high coating film temperature, enhancing the microwave absorption [14]. The method of Y2O3 nanoparticle using is known in the last years being applied in several domains, according to AzoNano, the leading online publication for the nanotechnology community [15], (television, microwave filters, inorganic synthesis of compounds, making fluorescent lamps, etc.).…”

Section: Introductionmentioning

confidence: 99%

Porous thermal insulation building material made of recycled glass waste by microwave heating

Paunescu¹,

Axinte²,

Păunescu³

et al. 2022

RRIC/RJCE

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Rezumat. Lucrarea prezintă rezultate experimentale obținute în procesul fabricării sticlei celulare utilizând încălzirea indirectă cu microunde. Intensificarea absorbției microundelor a fost realizată utilizând un creuzet din carbură de siliciu având peretele acoperit cu un film din oxid de ytriu. Încălzirea cu microunde și folosirea oxidului de ytriu reprezintă originalitatea lucrării. Rețeta conținând deșeu de sticlă, cenușă și carbură de siliciu a permis producerea sticlei celulare la 960-970 ºC cu consumuri economice de energie (sub 0,86 kWh/kg). Produsele au caracteristicile specifice sticlei celulare cu densitatea intre 0,27-0,33 g/cm 3 , conductivitatea termică între 0,064-0,073 W/m•K și rezistența la compresiune între 1,35-1,45 MPa.Cuvinte cheie: sticlă celulară, încălzire cu microunde, deșeu de sticlă, cenușă de cărbune, carbură de siliciu, oxid de ytriu.

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Progress in infrared transparencies under opto electro thermo and mechanical environments

Xu,

Guo,

Ralchenko

et al. 2023

Surf. Sci. Tech.

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In recent years, there has been a growing interest and research focus on infrared optical thin films as essential components in infrared optical systems. In practical applications, extreme environmental factors such as aerodynamic heating and mechanical stresses, electromagnetic interferences, laser interferences, sand erosions, and rain erosions all lead to issues including cracking, wrinkling, and delaminations of infrared thin films. Extreme application environment imposes stringent requirements on functional films, necessitating high surface hardness, stability, and adhesion. Additionally, for multispectral optical transmissions, infrared optical thin films are expected to exhibit high transmittance in the visible and far-infrared wavelength bands while possessing tunability and optical anti-reflection properties in specific wavelength ranges. Electromagnetic shielding requires superior electrical performance, while resisting laser interference demands rapid phase change capabilities. This paper focuses on current research progresses in infrared optical thin films under extreme conditions such as opto, electro, thermos and mechanical environments. Table of Contents Graphic gives detailed outline. Future opportunities and challenges are also highlighted. Graphical Abstract

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The tunable dielectric properties of sputtered yttrium oxide films

Cited by 7 publications

References 44 publications

Effects of the Deposition Mode and Heat Treatment on the Microstructure and Wettability of Y2O3 Coatings Prepared by Reactive Magnetron Sputtering

Effects of the Deposition Mode and Heat Treatment on the Microstructure and Wettability of Y2O3 Coatings Prepared by Reactive Magnetron Sputtering

Porous thermal insulation building material made of recycled glass waste by microwave heating

Progress in infrared transparencies under opto electro thermo and mechanical environments

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