Theoretical and experimental investigation of mode localization in electrostatically and mechanically coupled microbeam resonators

Ilyas, Saad; Younis, Mohammad I.

doi:10.1016/j.ijnonlinmec.2020.103516

Cited by 21 publications

(5 citation statements)

References 38 publications

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“…[388] Linear modal coupling between two or more resonators can occur via a common elastic support for designing MEMS filters [389][390][391] and mode-localized sensors. [81,[392][393][394] For two resonators in proximity, this coupling can be of an electrostatic nature. [395] Zanette et al [142] recently scrutinized energy transfer between two linearly coupled mechanical oscillators under ringdown conditions.…”

Section: Linear Modal Coupling: Resonator Arraysmentioning

confidence: 99%

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A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical resonators, provide an unprecedented platform for investigating a wide range of applications in both fundamental physical phenomena (such as quantum‐level problems) and engineering and applied sciences (like sensing physical quantities and signal processing). In sensing context, these tiny resonators are invaluable tools for detecting weak forces and single molecules. Measuring such small variations in sub‐nanometer amplitudes at high frequencies has created many practical challenges. Therefore, maximizing the responsivity to a specified input parameter and minimizing the responsivity to other inputs such as noise are considered as the optimal design for the excellent performance in nanoresonators. The present review aims to summarize some of the recent progress in this rapidly advancing field. Specifically, more attention is paid to the topics related to the dynamical behaviors of micro/nanoresonator and their practical applications. First, the theory behind micro/nanoresonators is described. Then a summary is presented of the basic concepts in resonant devices. In addition, several commonly dynamical techniques to enhance sensitivity are introduced. Finally, the devices are classified based on linear and nonlinear, single and array, symmetric and asymmetric, and frequency shift‐based and amplitude shift‐based resonators, along with the relative advantages and disadvantages of each one in engineering applications.

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Section: Linear Modal Coupling: Resonator Arraysmentioning

confidence: 99%

“…Linear modal coupling between two or more resonators can occur via a common elastic support for designing MEMS filters [ 389–391 ] and mode‐localized sensors. [ 81,392–394 ] For two resonators in proximity, this coupling can be of an electrostatic nature. [ 395 ] Zanette et al.…”

Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning

confidence: 99%

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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“…Next, we designed the contour surface of the bionic structure based on Equation (6). According to the mode expression, the maximum displacement occurred at r = 0, then  …”

Section: The Contour Surface Equationmentioning

confidence: 99%

“…Microresonators play an important role in high-frequency oscillators, filters, and sensors (accelerometer, gyroscope, etc.). Common microresonators are microbeams [3,6], microrings [7], and microplates [8], which are relatively simple and regular in terms of geometric structures. With the development of MEMS, microresonators with complex three-dimensional structures have been designed to meet the performance requirements such as microhemisphere [9], shallow arch microbeam [10], slot structure [11], laminated structure [12], and so on.…”

Section: Introductionmentioning

confidence: 99%

Dynamic Properties of Microresonators with the Bionic Structure of Tympanic Membrane

Tai

Zhou

Chen

2020

Sensors

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The structure of a microresonator will affect the vibration characteristics and the performance of the system. Inspired by the structural characteristics of the human tympanic membrane, this paper proposed a microresonator with the bionic structure of a tympanic membrane. The structure of a tympanic membrane was simplified to a regular shape with three structural parameters: diameter, height, and thickness. To imitate the tympanic membrane, the contour surface of the bionic structure was modeled based on the formula of transverse vibration mode of a circular thin plate. The geometric model of the bionic structure was established by using the three structural parameters and the contour surface equation. The dynamic properties of the bionic model were studied by the finite element method (FEM). We discuss the modal characteristics of the bionic structure and study the effect of structural parameters and scale on the dynamic properties. The advantages of the bionic structure were investigated by a comparison with circular plate microresonators. The results illustrate that the bionic structure can significantly improve the resonant frequency and have a much larger effective area of vibration displacement.

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“…A mode localization also occurred where the mass was added. Since then, many references proposed to use the mode localization effect as the basis of mass sensing: with linear modes [29][30][31][32] or with linear and nonlinear ones [33,34]. Wang et al [35] used five mechanically coupled beams to perform a mode localization analysis.…”

Section: Introductionmentioning

confidence: 99%

Mass sensing by symmetry breaking and localization of motion in an array of electrostatically coupled nonlinear MEMS resonators

Grenat

Baguet

Lamarque

et al. 2022

International Journal of Non-Linear Mechanics

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Theoretical and experimental investigation of mode localization in electrostatically and mechanically coupled microbeam resonators

Cited by 21 publications

References 38 publications

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Dynamic Properties of Microresonators with the Bionic Structure of Tympanic Membrane

Mass sensing by symmetry breaking and localization of motion in an array of electrostatically coupled nonlinear MEMS resonators

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