Theoretical and Experimental Studies on Ultraviolet Nanosecond Laser Micromachining of Sapphire

Fang, Xuyang; Wang, Shuai; Li, Bin

doi:10.1080/10584587.2022.2102811

Cited by 3 publications

(2 citation statements)

References 15 publications

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“…Due to the high temperature resistance, difficult corrosion and high level of hardness of sapphire materials, there are only a few ways to etch sapphire, such as mechanical cutting [ 25 ], wet etching [ 26 ], dry etching [ 27 ] and laser ablation [ 28 ]. Compared with other processing methods, laser ablation is more suitable for processing hard and brittle materials, with the advantages of fast processing speed and flexible processing methods [ 29 ].…”

Section: Sensitive-unit Preparationmentioning

confidence: 99%

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High-Temperature Fiber-Optic Fabry–Perot Vibration Sensor Based on Single-Crystal Sapphire

Liu

Jia

et al. 2023

Sensors

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In this paper, a fiber-optic Fabry–Perot (F–P) vibration sensor that can work at 800 °C is proposed. The F–P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 °C. The nonlinearity was evaluated from 20 °C to 800 °C with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the x-axis and y-axis. The vibration sensor will have wide high-temperature engineering-application prospects.

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Section: Sensitive-unit Preparationmentioning

confidence: 99%

“…The laser-ablation experiments [ 29 , 30 ] were set up using the ultraviolet micromachining system (DelphiLaser FPC03, Suzhou, China) to select the appropriate laser-processing parameters. In the experiments, an ultraviolet laser with a wavelength of 355 nm was used for the ablation of the sapphire.…”

Section: Sensitive-unit Preparationmentioning

confidence: 99%