Theoretical and Experimental Study on Hot-Embossing of Glass-Microprism Array without Online Cooling Process

Hu, Manfeng; Xie, Jianhe; Li, Wei; Niu, Yuanhang

doi:10.3390/mi11110984

Cited by 9 publications

(6 citation statements)

References 41 publications

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“…Taking into account fabrication of polymer microprisms by hot embossing replacement of micro-milled master mold by wet etched silicon wafer is possible. Also theoretical and experimental study on hot embossing of glass microprisms supports this conclusion [19].…”

Section: Discussionmentioning

confidence: 57%

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Glass microprism matrix for fluorescence excitation in lab-on-a-chip platforms

Pokrzywnicka

Śniadek

Walczak

2021

J. Micromech. Microeng.

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In this paper, an integrated microprism matrix for light coupling and optical sensing systems is presented. The matrix was fabricated by use of controlled negative pressure glass thermal reflow process by the use of monocrystalline mold. The single glass microprism had height of 250 µm or 350 µm with base width respectively 350 µm or 500 µm. The matrix was formed by 10 × 10 microprisms with distance between the microprisms from 150 µm to 400 µm. It corresponded to total area of the matrixes from 28 mm2 to 74 mm2. The controlled coupling of the beam into a substrate was obtained through determination of optimal geometric dimensions of microprisms and configuration of a measurement setup. Optimal position of the fluorescence induction light source in relation to the matrixes (0.5 cm to 4.5 cm distance, 30° angle of incidence) and microfluidic channel (4 mm) were determined. The fluorimetric tests (with excitation by 470 nm laser diode in all the experiments) carried out using fluorescein solution, microbeads and porcine oocyte indicated the possibility of using a microprism matrix for fluorimetric image-based 500 nm long-pass detection in lab-on-a-chip platforms.

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Section: Discussionmentioning

confidence: 57%

“…Often coupling microstructures are ablated with femtosecond laser or hot embossed in glass or molded in a layer of polymer on top of the chip [18][19][20][21][22]. Usage of each kind of material for lab-chip and microstructures fabrication brings limitation either for biological analysis possibilities or optical detection efficiency.…”

Section: Introductionmentioning

confidence: 99%

Glass microprism matrix for fluorescence excitation in lab-on-a-chip platforms

Pokrzywnicka

Śniadek

Walczak

2021

J. Micromech. Microeng.

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“…However, this method has weaknesses, such as applying an excessive pressing load will cause master mold to break [ 44 , 45 ]. In addition, overheating at the embossing step may cause deformation of the acrylic thin film [ 46 , 47 ]. Furthermore, pulling an embossed acrylic film out of a master mold may cause damage to the nanogrooves on a master mold [ 48 ].…”

Section: Discussionmentioning

confidence: 99%

Fabrication of Nanogroove Arrays on Acrylic Film Using Micro-Embossing Technique

Raksiri,

Potejanasak,

Dokyor

2023

Polymers

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The fabrication of nanostructures is of great importance in producing biomedical devices. Significantly, the nanostructure of the polymeric film has a significant impact on the physical and biophysical behavior of the biomolecules. This study presents an efficient nanofabrication method of nanogroove structures on an acrylic film by the micro-embossing process. In this method, a master mold was made from a thermos oxide silicon substrate using photolithography and etching techniques. An isotropic optical polymethyl methacrylate (PMMA) film is used in the experiment. The acrylic film is known for its excellent optical properties in products such as optical lenses, medical devices, and various general purpose engineering plastics. Then, the micro-embossing process was realized to fabricate nanogroove patterns on an acrylic film by using a micro-embossing machine. However, the morphology of the nanopatterns on an acrylic film was characterized by using an atomic force microscope to measure the dimensions of the nanogroove patterns. The impact of embossing temperature on the morphology of nanogroove patterns on acrylic film is experimentally investigated. The results show that when the embossing temperature is too small, the pattern is not fully formed, and slipping occurs in nanopatterns on the acrylic film. On the other hand, the effect of increasing the embossing temperature on the morphology of nanogrooves agrees with the master mold, and the crests between the nanogrooves form straight edges. It should be noted that the micro-embossing temperature also strongly influences the transferability of nanopatterns on an acrylic film. The technique has great potential for rapidly fabricating nanostructure patterns on acrylic film.

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“…Hu et al [115] simulated a low strain rate to reduce thermal stress and study deformation behavior during micro hot embossing. The simulation model of a micro-HE glass-micro-prism array is depicted in figure 22.…”

Section: Simulated Analysis Of Replication Accuracy In the Micro-he P...mentioning

confidence: 99%

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

Datta

Deshmukh²,

Kar³

et al. 2023

Eng. Res. Express

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Micro-hot embossing (micro-HE) of polymeric materials creates exact micro/nanoscaled designs. Micro-HE processes include plate-to-plate (P2P), roll-to-roll (R2R), and roll-to-plate (R2P). Micro-HE is preferred for large-scale production of micro-patterns on polymer substrates. However, the lack of simulation models for optimization and component design prevents the broad use of this technology. As the size of the micro patterns decreases from micron to sub-micron, it improves performance features. Micro-HE cannot be analyzed using software tools like injection molding since there is no macroscopic equivalent. Commercial simulation software covers injection molding and associated processes. No commercial tool covers all micro-HE process steps, variations, and boundary conditions. According to the authors, such review articles aren't in the literature. This article summarizes the simulation work in the micro-HE process field related to replication accuracy, and mold filling behaviour. In addition to this, various models were discussed based on properties of material, based on various forces participating in the HE process, and gives a detailed idea about mold-filling behavior and demolding analysis. Finally challenges and future scope related to modelling and simulation work in field of hot embossing has been presented.

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Theoretical and Experimental Study on Hot-Embossing of Glass-Microprism Array without Online Cooling Process

Cited by 9 publications

References 41 publications

Glass microprism matrix for fluorescence excitation in lab-on-a-chip platforms

Glass microprism matrix for fluorescence excitation in lab-on-a-chip platforms

Fabrication of Nanogroove Arrays on Acrylic Film Using Micro-Embossing Technique

A review on modelling and numerical simulation of micro hot embossing process: fabrication, mold filling behavior, and demolding analysis

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