2019
DOI: 10.1016/j.jcrysgro.2019.04.012
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Theoretical aspects and microstructural investigations on V-pit defects in HVPE grown GaN

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Cited by 4 publications
(3 citation statements)
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“…5, it becomes clear why this region has a longer wavelength contribution in the spectrum and thus a redshift in the first moment mapping. In fact, it is possible to recognize V-pits [42], [43] (circled by a blue hexagonal line) and a trench-like defect (circled by a red line) [44]. The latter defect is found to originate from a stacking fault lying in the basal plane (BSF), which is connected to a vertical SMB terminating at the Vshaped trenches [45].…”
Section: Characterization and Discussionmentioning
confidence: 99%
“…5, it becomes clear why this region has a longer wavelength contribution in the spectrum and thus a redshift in the first moment mapping. In fact, it is possible to recognize V-pits [42], [43] (circled by a blue hexagonal line) and a trench-like defect (circled by a red line) [44]. The latter defect is found to originate from a stacking fault lying in the basal plane (BSF), which is connected to a vertical SMB terminating at the Vshaped trenches [45].…”
Section: Characterization and Discussionmentioning
confidence: 99%
“…The resulting scan is shown in Figure 3 a. The surface was mostly free of V-pits [ 18 , 19 ]; however, a high degree of step bunching [ 20 , 21 ] led to the formation of macrosteps of an average height of 13 nm, leading to a roughness of . Convinced that the macrosteps would needlessly complicate our reflectometry and ellipsometry measurements, we opted to remove about 15 nm of the layer with a silica-based chemical mechanical polishing (CMP) process, optimized to produce smooth surfaces ready for further epitaxial growth (similar to [ 22 ]).…”
Section: Methodsmentioning
confidence: 99%
“…In MEI irradiation, both nuclear energy loss and electronic energy loss are comparable to each other and lead to combined effects or non-linear combined effects on damage production and damage recovery processes [15]. These effects of MEI irradiation lead to disorder build-up and microstructure expansion [16][17][18][19][20]. Studies on ion irradiation-induced effects in GaN semiconductor devices have been reported in the literature.…”
Section: Introductionmentioning
confidence: 99%