Theoretical simulation of spatial-time characteristics of a discharge XeCl excimer laser active medium

Sorkina, R. A.

doi:10.1088/0022-3727/23/7/009

Cited by 20 publications

(6 citation statements)

References 21 publications

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“…Spatial uniformity of the active medium is assumed. This approach of a zero-dimensional modelling has shown to be reasonable in describing laser performance by comparing the zero-and one-dimensional calculations for He based mixtures with experiments [6,9].…”

Section: Model Descriptionmentioning

confidence: 99%

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Simulation studies of the prepulse-main-pulse XeCl discharge lasers with magnetic switching

1992

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Abstract.A self-consistent model of a self-sustained discharge XeC1 laser (Ne/Xe/HCI mixture) with prepulse-mainpulse excitation and magnetic switching which leads to high efficiency operation is described. The validity of the model is confirmed by comparing the results of the calculations with the measured time dependences of discharge voltage, current and lasing pulse for different operation modes as well as by comparing the results with the dependences of the laser output energy and efficiency on the charging voltage and capacitance of the pulse forming network for two different laser heads. The numerical evaluation has shown that our developed laser system operates under optimum conditions. PACS: 42.55.Gp Potential applications of excimer lasers as sources of UV radiation in industries, especially in photochemistry and materials processing require very high average power lasers. Commercially available excimer lasers produce hundreds of watts of average power at an efficiency of up to 2.5% in some cases 3% (e.g., LPX240i or LAMBDA4000). A number of laboratories are working on the development of excimer lasers with 1 kW average power by means of a fast flowing gas circulation system. A breakthrough in this development was obtained by the introduction of the so-called prepulse-main-pulse technique in which the prepulse is used for the avalanche ionization process during the breakdown phase whereas the main pulse is applied under quasi-steady-state conditions [1][2][3][4]. The introduction of passive magnetic switches for isolation of low-impedance sustainer and high-impedance spiker circuits instead of railgap switches enables long-life operation capability of the laser at high repetition rates [2][3][4] Computer modeling is a useful tool for investigating the physical processes occurring in the active media of excimer lasers and the influence of the large number of parameters that are involved. It supplements the experiments and will be used to optimize the development of various laser designs.In this paper we present a theoretical model of a high efficient discharge XeC1 laser with prepulse-main-pulse and the magnetic switching technique. The results of the computer simulations are compared with the experimental ones of the lasers developed at the Twente University of Technology [4]. The model is based on the standard excitation schemes of He [6] and Ne [7] based mixtures, which are in good agreement with the experimental data, including time dependences of the densities of discharge species. Although computer simulations were mentioned in [1,3] and shortly described in [8] (not including the Boltzmann equation for the electron distribution), we shall describe the complete model of a discharge XeC1 laser with the advanced excitation circuit and improved kinetics. We shall discuss and compare the results of the simulations with the experiments for different modes of laser operation and for different laser heads.

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Section: Model Descriptionmentioning

confidence: 99%

“…The algorithm for solving the Boltzmann equation [9] has been described in detail in [12]; the method is similar to that described in [13]. The rate constants of …”

Section: Model Descriptionmentioning

confidence: 99%

Simulation studies of the prepulse-main-pulse XeCl discharge lasers with magnetic switching

1992

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“…The balance of electron production and loss, in preionized discharges for excimer lamps and lasers, is strongly influenced by the halogen concentration in the mixture due to the dominant electron loss process, which is the dissociative attachment of electrons to halogen molecule [5,10,14,15,18,[30][31][32][33][34]. To know the effect of the gas mixture composition on the streamer's characteristics, we performed calculations for five concentrations of halogen HCl: 0.044, 0.13, 0.26, 0.36, and 0.5%.…”

Section: Resultsmentioning

confidence: 99%

Theoretical investigation of streamer characteristics in Ne–Xe–HCl pulsed high-pressure discharges

2014

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The aim of this work is to highlight some quantities characterizing the anode-directed streamer generated in the Ne/Xe/HCl gas mixture plasma at high pressure and under non-uniform preionization conditions. This mixture is used as excitation medium for XeCl excimer lasers. A comprehensive model of discharge is presented. This model gives the space-time evolution of electron density and electric field, streamer appearance time, streamer expansion distance and velocity. The effect of HCl concentration in the gas mixture, as well as gas pressure and gap distance on streamer characteristics, have been investigated and discussed. Calculations suggest that the streamer velocity is patently affected by the gap distance with a significant dependence on the HCl concentration in the gas mixture.

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“…The authors are not aware of any theoretical model for a discharge-pumped ArF laser satisfying the requirements discussed above. Some of the above-discussed problems were studied while modelling XeCl and KrF excimer lasers [16][17][18][19][20][21][22][23]. In this paper the achievements obtained in the previous papers are taken into account in our formulation of the parallel-resistor model which includes filaments.…”

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confidence: 99%

Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

Dem'yanov¹,

Feenstra

Peters

et al. 2001

Appl Phys B

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Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spikersustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron-electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron-electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically.

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Theoretical simulation of spatial-time characteristics of a discharge XeCl excimer laser active medium

Cited by 20 publications

References 21 publications

Simulation studies of the prepulse-main-pulse XeCl discharge lasers with magnetic switching

Simulation studies of the prepulse-main-pulse XeCl discharge lasers with magnetic switching

Theoretical investigation of streamer characteristics in Ne–Xe–HCl pulsed high-pressure discharges

Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

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