Theoretical Study on Self-Mixing Laser Diode Maximum Measurable Velocity

Zhaoyun, 张照云 Zhang; Yang, 高杨 Gao; Xinghai, 赵兴海 Zhao; Xiang, 赵翔 Zhao

doi:10.3788/cjl20103701.0211

Cited by 3 publications

(1 citation statement)

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“…2 The phenomenon of electrode pinholes and shedding [6] In order to design a metal electrode of high ability of anti-HF acid corrosion, the metal electrode corrosion property was studied from the metal material, the metal thickness, the metal layer number, the solution property and corrupt temperature, and so on the other condition. Through the study, we obtain the following conclusions [6]: with different materials as the substrate material, the corrosion resistance of the metal electrode is not the same, Tiw as a Substrate material the corrosion resistance of the metal electrode can be better than Cr, Mo as a primer material. Appropriate to reduce the thickness of the substrate metal layer, electrode corrosion resistance is better.…”

Section: A the Corrosion Study Of Metal Electrodementioning

confidence: 99%

The Key Technologies of SOI Micro-Accelerometer Front Release Process

Zhang

Shi

Xiao

et al. 2013

KEM

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In order to develop the SOI micro-accelerometer front release process, this paper discusses in details the key technologies of the process. There are three problems need to be resolved: the corrosion of the electrode, the corrosion rate of the buried silicon dioxide layer as well as the anti-adhesion of the micro-structure. The corrosion characteristic of the electrode is studied, and a metal electrode of high ability of anti-HF acid corrosion is designed, after release of the micro-structure, the electrode does not fall off. The corrosion property of the buried silicon dioxide is studied, and the corrosion rate is exactly known for 2um and 5um thick buried silicon dioxide layer. Based on this, the buried silicon dioxide layer etching time can be controlled, preventing over-etching of the oxide layer. The adhesion of comb fingers and the mass with the substrate is settled at last. By electron microscopy tests, found that the process can get a good micro-structure surface, with smaller footing effects. By test, the sensitivity of the accelerometer is about 144.5mv/g.

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Section: A the Corrosion Study Of Metal Electrodementioning

confidence: 99%