Theoretical Uniformity Analysis and Improvement of Spray Deposition by Mixing Nozzles with Heating Conditions

Abstract

Spray coating is widely used in the manufacture of deposited layers of electronic devices due to its unique advantages of high-speed deposition over a large area. To improve the spray deposition process for further low-cost and uniform production, the uniformity of the spray deposition should be systematically investigated. The current study, however, mainly focuses on the experimental trials with few numerical directions especially for the mixing nozzle sprayers with heating conditions. In the paper, we conduct a theoretical study on the uniformity of the internal and external mixing nozzles. The influencing factors include the initial angle, the total ink flow rate, the transporting gas velocity and the distance from the nozzle to the substrate. Then, the orthogonal test method is adopted to obtain the optimal combination of the parameters. Finally, the effects of different heating modes on the uniformity have been further studied. The results show that these factors influence the uniformity with the two types of nozzles to a different degree. The evaporation of the atomized droplets can effectively improve the uniformity in a certain temperature range. The heating temperature with the highest uniformity is various depending on the heating modes, which should be carefully addressed during the actual production.