Abstract:We report the results of our research and development in techniques for producing elliptical x-ray mirrors by controlled bending of a flat substrate. We review the theory and technique of mirror bending with emphasis on the optical engineering issues and describe our design concepts for both metal and ceramic mirrors. We provide analysis of the various classes of error that must be addressed to obtain a high quality elliptical surface and a correspondingly fine focus of the x-ray beam. We describe particular m… Show more
“…An elliptical mirror (Howells et al, 2000) is usually designed by giving the incident grazing angle of the incident beam g and the focal positions: source-mirror distance p and mirrorfocus distance q. The semi-axes a and b of the ellipse are:…”
Section: Appendix C Elliptical Detrendingmentioning
An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper, with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. Some optics simulations are presented and discussed to illustrate the real use of the profiles from the database.
“…An elliptical mirror (Howells et al, 2000) is usually designed by giving the incident grazing angle of the incident beam g and the focal positions: source-mirror distance p and mirrorfocus distance q. The semi-axes a and b of the ellipse are:…”
Section: Appendix C Elliptical Detrendingmentioning
An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal position in a beamline due to mirror surface errors. This database for metrology (DABAM) aims to provide to the users of simulation tools the data of real mirrors. The data included in the database are described in this paper, with details of how the mirror parameters are stored. An accompanying software is provided to allow simple access and processing of these data, calculate the most usual statistical parameters, and also include the option of creating input files for most used simulation codes. Some optics simulations are presented and discussed to illustrate the real use of the profiles from the database.
“…The upstream and downstream benders apply a torque to the upstream and downstream ends of the mirror, with the ends as the centers of rotation. [20][21][22][23] The following procedures optimally configure the available degrees of freedom of both mirrors in situ. The first step for both mirrors is to simultaneously set the height and pitch of the mirrors.…”
Section: Optimal Settings Of Bendable Focusing Mirrorsmentioning
Abstract. We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the Advanced Light Source Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200 nm ðhorizontalÞ × 100 nm ðverticalÞ. After applying this methodology, we measured a beam waist size of 290 nm ðhorizontalÞ × 130 nm ðverticalÞ with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.
“…The upstream and downstream benders apply a torque to the upstream and downstream ends of the mirror, with the ends as the centers of rotation. [20][21][22][23] The following procedures optimally configure the available degrees of freedom of both mirrors in situ. The first step for both mirrors is to simultaneously set the height and pitch of the mirrors.…”
Section: Optical System For Diffraction-limited Focusing Of Soft X-raysmentioning
We demonstrate a comprehensive and broadly applicable methodology for the optimal in situ configuration of bendable soft x-ray Kirkpatrick-Baez mirrors. The mirrors used for this application are preset at the ALS Optical Metrology Laboratory prior to beamline installation. The in situ methodology consists of a new technique for simultaneously setting the height and pitch angle of each mirror. The benders of both mirrors were then optimally tuned in order to minimize ray aberrations to a level below the diffraction-limited beam waist size of 200 nm (horizontal) × 100 nm (vertical). After applying this methodology, we measured a beam waist size of 290 nm (horizontal) × 130 nm (vertical) with 1 nm light using the Foucault knife-edge test. We also discuss the utility of using a grating-based lateral shearing interferometer with quantitative wavefront feedback for further improvement of bendable optics.
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