“…However, it was demonstrated by MBE growth that Si4C (20% C) ordered alloys can be pseudomorphic on Si [5,6]. Theoretical studies [7] have analyzed the precursor molecules for CVD growth, the corresponding crystal structures, and the band structures for Si4C, Ge4C, Sn4C, and other ordered alloys with high C content. The band structures were not calculated for films strained to Si, but rather for "bulk" materials, which would require substrates with suitable lattice constants, a problem without an obvious solution.…”