Thermal ablation of metal films by femtosecond laser bursts

Ren, Yunpeng; Cheng, Chung-Wei; Chen, J. K.; Zhang, Kun; Tzou, D. Y.

doi:10.1016/j.ijthermalsci.2013.03.003

Cited by 47 publications

(15 citation statements)

References 29 publications

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“…In the phase change model, the liquid-vapor interfacial velocity can be calculated from the vaporization wave model and shock wave theory [26,27]. The details of these models can be found in reference [28]. They are not described here for brevity.…”

Section: Modelingmentioning

confidence: 99%

Drilling of Copper Using a Dual-Pulse Femtosecond Laser

Cheng

Chen

2016

Technologies

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Abstract:The drilling of copper using a dual-pulse femtosecond laser with wavelength of 800 nm, pulse duration of 120 fs and a variable pulse separation time (0.1-150 ps) is investigated theoretically. A one-dimensional two-temperature model with temperature-dependent material properties is considered, including dynamic optical properties and the thermal-physical properties. Rapid phase change and phase explosion models are incorporated to simulate the material ablation process. Numerical results show that under the same total laser fluence of 4 J/cm 2 , a dual-pulse femtosecond laser with a pulse separation time of 30-150 ps can increase the ablation depth, compared to the single pulse. The optimum pulse separation time is 85 ps. It is also demonstrated that a dual pulse with a suitable pulse separation time for different laser fluences can enhance the ablation rate by about 1.6 times.

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Section: Modelingmentioning

confidence: 99%

Drilling of Copper Using a Dual-Pulse Femtosecond Laser

Cheng

Chen

2016

Technologies

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“…(1)(2)(3)(4)(5)(6)(7)(8) The ultrahigh instantaneous power and ultrashort pulse duration of femtosecond laser pulses produces nonlinear (9,10) and nonequilibrium processes. (11,12) Several models based on different theories have been developed to study the interaction processes and subsequent dynamic evolution of the target.…”

Section: Introductionmentioning

confidence: 99%

Hydrodynamic Simulation of the Femtosecond Laser Processing of Metals

Su¹,

Wang²,

Jiang³

2018

dtetr

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The electron-ion collision frequency is a key factor for simulations of the interaction process of ultrashort lasers with metals. In this paper, we propose a semiempirical method based on the Drude-Sommerfeld model for obtaining the electron-ion collision frequency over a wide temperature range, from solid-state to high-temperature plasma. Moreover, we performed a series of hydrodynamic simulations including the modified electron-ion collision frequency. The results indicated that the modified electron-ion collision frequency can exactly describe not only the energy deposits of various femtosecond laser pulses but also the transient properties of electrons on the metal surface. Moreover, a simple function was identified to describe the relationship between laser intensity and peak electron temperature on the surface. This mothed is expected to be beneficial for simulations of the interaction process of femtosecond laser pulses with metals.

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“…So, on the one hand, enhanced ablation was reported for different kinds of material when processing in double-pulse regime, compared to single-pulse processing with similar energies. This was determined, for example, in silicon [22], silver foils [25], aluminum and copper [27] and copper films [28][29][30], steel [27,31], or nickel in vacuum [16]. On the other hand, by contrast, a few studies identified insignificant or no increase of metal ablation for double-pulse processing, as stated for aluminum [32], copper [19], and titanium [21].…”

Section: Introductionmentioning

confidence: 99%

Experimental study on double-pulse laser ablation of steel upon multiple parallel-polarized ultrashort-pulse irradiations

et al. 2016

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In this paper, double-pulse laser processing is experimentally studied with the aim to explore the influence of ultrashort pulses with very short time intervals on ablation efficiency and quality. For this, sequences of 50 double pulses of varied energy and inter-pulse delay, as adjusted between 400 fs and 18 ns by splitting the laser beam into two optical paths of different length, were irradiated to technical-grade stainless steel. The depth and the volume of the craters produced were measured in order to evaluate the efficiency of the ablation process; the crater quality was analyzed by SEM micrographs. The results obtained were compared with craters produced with sequences of 50 single pulses and energies equal to the double pulse. It is demonstrated that double-pulse processing cannot exceed the ablation efficiency of single pulses of optimal fluence, but the ablation crater surface formed smoother if inter-pulse delay was in the range between 10 ns and 18 ns. In addition, the influence of pulse duration and energy distribution between the individual pulses of the double pulse on ablation was studied. For very short inter-pulse delay, no significant effect of energy variation within the double pulse on removal rate was found, indicating that the double pulse acts as a big single pulse of equal energy. Further, the higher removal efficiency was achieved when double-pulse processing using femtosecond pulses instead of picosecond pulses.

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Thermal ablation of metal films by femtosecond laser bursts

Cited by 47 publications

References 29 publications

Drilling of Copper Using a Dual-Pulse Femtosecond Laser

Drilling of Copper Using a Dual-Pulse Femtosecond Laser

Hydrodynamic Simulation of the Femtosecond Laser Processing of Metals

Experimental study on double-pulse laser ablation of steel upon multiple parallel-polarized ultrashort-pulse irradiations

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