Thermal characterization of a microheater for micromachined gas sensors

Baroncini, M.; Placidi, P.; Cardinali, G.C.; Scorzoni, A.

doi:10.1016/j.sna.2004.03.012

Cited by 92 publications

(57 citation statements)

References 22 publications

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“…Micro heater design and characterization is the key component for thermal type fluid flow sensor or device (Baroncini et al 2004;Kahroba et al 2008;Khanna et al 2007). Numerous research paper published in this area have used various type of heating element in their micro flow sensing device, such as silicon carbide (SiC), platinum (Pt), polysilicon, titanium nitride (TaN) (Chung et al 2009) etc.…”

Section: Design Process Of the Micro Thermal Flow Sensormentioning

confidence: 99%

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Mistry

Mahapatra

2012

Microsyst Technol

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Thermo transfer type MEMS (Micro Electro Mechanical System) based micro flow sensing device have promising potential to solve the limitation of implantable arterial blood flow rate monitoring. The present paper emphasizes on modeling and simulation of MEMS based micro flow sensing device, which will be capable of implantable arterial blood flow rate measurement. It describes the basic design and model architecture of thermal type micro flow sensor. A pair of thin film micro heaters is designed through MEMS micro machining process and simulated using CoventorWare; a finite element based numerical code. A rectangular cross section micro channel has been modeled where in micro heater and thermal sensors are embedded using the same CoventorWare tools. Some promising and interesting results of thermal dissipation depending upon very small amount of flow rate through the micro channel are investigated. It is observed that measuring the variation of temperature difference between downstream and upstream, the variation of fluid flow rate in the micro channel can be measured. The numerical simulation results also shows that the temperature distribution profile of the heated surface depends upon microfluidic flow rate i.e. convective heat transfer is directly proportional to the microfluidic flow rate on the surface of the insulating membrane. The simplified analytical model of the thermo transfer type flow sensor is presented and verified by simulation results, which are very promising for application in arterial blood flow rate measuring in implantable micro devices for continuous monitoring of cardiac output.

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Section: Design Process Of the Micro Thermal Flow Sensormentioning

confidence: 99%

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Mistry

Mahapatra

2012

Microsyst Technol

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“…A double-spiral shape with large line width is chosen as the basic heater design 11 to have more uniform heating profile and temperature distribution inside the microchamber. 12 The heater was also used as a temperature sensor during the experiment with a special configuration to achieve the measurement similar to four-point probe for better resistance measurement accuracy. A small-line width resistor is designed in between the spiral-shape heater, as an auxiliary temperature sensor, to have higher resistance values for the heater materials with low resistivity.…”

Section: Chipmentioning

confidence: 99%

On-Chip Cryopreservation of Living Cells

Liu

Lin

2010

JALA: Journal of the Association for Laboratory Automation

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On-chip cryopreservation of biological cells under low-temperature environments has been successfully demonstrated using a microfabricated chip with an incubation microchamber and microfluidic channels. Microheaters are used as both the resistive heating elements and temperature sensors to control the temperature profile of microenvironment under the liquid nitrogen cooling process. A two-step, temperature-controlled, on-chip cryopreservation process is applied for yeast cells, and after the thawing process, 74% cell survival rate has been accomplished. The reference experiment conducted without using the temperature control results in 27% cell survival rate. As such, this technique could have potential applications in on-chip cryopreservation processes, including those for sperm, embryo, or future cryogenic-based, lab-on-a-chip applications.

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“…These micro-heaters need to be small in size, stable at higher temperatures (~400 °C) and should consume low power. Attempts have been made for the optimization of microheater (Sheng 1998;Agbor 1997;Xu 2011;Lee 1996;Baroncini et al 2004;Creemer et al 2008;Hwang et al 2011;Vereshchagina et al 2015;Saxena 2013) platform for gas sensing application. To realize a reliable micro-heater platform for gas sensing applications, various materials, geometries and sizes have been considered.…”

Section: Introductionmentioning

confidence: 99%

Low power highly sensitive platform for gas sensing application

2015

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of the heater device show their ruggedness and repeatability. Stable heater temperature with standard deviation (σ) of 0.015 obtained during continuous powering for an hour. Cyclic ON-OFF test on the device indicate the ruggedness of the micro-heater. High sensitivity of the device for was observed for ammonia (NH 3 ), resulting in 40 % response for ~4 ppm gas concentration at 230 °C operating temperature.

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Thermal characterization of a microheater for micromachined gas sensors

Cited by 92 publications

References 22 publications

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

Design and simulation of a thermo transfer type MEMS based micro flow sensor for arterial blood flow measurement

On-Chip Cryopreservation of Living Cells

Low power highly sensitive platform for gas sensing application

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