The stacked nanosheet field effect transistor (SNSHFET) exhibits superior electrostatic performance with its increased effective channel width. However, as the technology node progressing towards angstrom dimensions, self-heating became one of the major challenges in SNSHFETs due to their confined geometry. The self-heating impacts not only the respective device, but also its contiguous device on the same substrate. In this paper, the thermal impact of heat stacked nanosheet FET (He-FET) on proximal cool stacked nanosheet FET (Co-FET) is studied at 7 nm technology node. Thermal impact on DC and analog/RF performance of Co-FET is deliberated by varying the inter-device spacing (IDS) and shallow trench isolation (STI) depth between the two stacked nanosheet FETs. It has been observed that, self-heating induced thermal energy of He-FET shows more impact on the bottom channels compared to the top channels in the Co-FET. The electron mobility is reduced by 4.25% in the channel near to the substrate compared to the channel near to contacts. The transit frequency (f T ) and the maximum oscillation frequency (f max ) of 131.5 GHz and 435 GHz were obtained, respectively with the optimization of IDS of 30 nm and STI depth of 50 nm.
INDEX TERMSInter-device spacing, Self-heating, Shallow trench isolation depth, Stacked nanosheet FET, Thermal intrude.