1987
DOI: 10.1116/1.574410
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Thermal desorption measurements for aluminum alloy 6063 and stainless steel 304

Abstract: A comparison of thermal outgassing rates of aluminum alloy and stainless steel vacuum chambers AIP Conf. Proc. 171, 244 (1988); 10.1063/1.37306 Outgassing behavior of A6063EX aluminum alloy and SUS 304 stainless steel J. Vac. Sci. Technol. A 5, 3422 (1987); 10.1116/1.574206 A comparison of outgassing rate of 304 stainless steel and A6063EX aluminum alloy vacuum chamber after filling with waterThis presentation describes thermal desorption spectroscopy from two materials: ultrasonically chemically cleaned alumi… Show more

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“…By applying the constant D 0 in Eq. ( 9) as 2.1 × 10 -6 m 2 s −1 16) and the activation energy E D as 96 meV which was estimated from the experiment result, we obtained the surface diffusion length of the water molecule as 1.3 × 10 5 nm for the contact time of 0.37 s at the substrate temperature of 213 K. Using the activation energy of the adsorption time for water molecules on the Al substrate as 1 eV, which was evaluated in the previous report, 33) and the constant of adsorption time as 1 × 10 -13 s, which is used generally, 31) the adsorption time of water molecules at the surface calculated by Eq. ( 8) would be 4 × 10 11 s which is larger than the contact time of 0.37 s. Therefore, the surface diffusion length of water molecules adsorbed on the substrate during the contact was assumed to be large enough to form a capillary between the particle and the substrate.…”
Section: -4mentioning
confidence: 99%
“…By applying the constant D 0 in Eq. ( 9) as 2.1 × 10 -6 m 2 s −1 16) and the activation energy E D as 96 meV which was estimated from the experiment result, we obtained the surface diffusion length of the water molecule as 1.3 × 10 5 nm for the contact time of 0.37 s at the substrate temperature of 213 K. Using the activation energy of the adsorption time for water molecules on the Al substrate as 1 eV, which was evaluated in the previous report, 33) and the constant of adsorption time as 1 × 10 -13 s, which is used generally, 31) the adsorption time of water molecules at the surface calculated by Eq. ( 8) would be 4 × 10 11 s which is larger than the contact time of 0.37 s. Therefore, the surface diffusion length of water molecules adsorbed on the substrate during the contact was assumed to be large enough to form a capillary between the particle and the substrate.…”
Section: -4mentioning
confidence: 99%