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A comparison of thermal outgassing rates of aluminum alloy and stainless steel vacuum chambers AIP Conf. Proc. 171, 244 (1988); 10.1063/1.37306 Outgassing behavior of A6063EX aluminum alloy and SUS 304 stainless steel J. Vac. Sci. Technol. A 5, 3422 (1987); 10.1116/1.574206 A comparison of outgassing rate of 304 stainless steel and A6063EX aluminum alloy vacuum chamber after filling with waterThis presentation describes thermal desorption spectroscopy from two materials: ultrasonically chemically cleaned aluminum alloy 6063 and stainless steel 304. Some new conclusions on vacuum and surface characterization are obtained. ( 1 ) On the surface of 304, there exist two types of adsorption states which desorb at 328 and 366 K, originating from, air exposure and water rinse separately; the corresponding desorption activation energies E are 22 and 25 kcallmol. For the unbaked sample, water is the major desorbed species and the quantities which originate from water rinse are two times from air exposure. (2) On the surface 6063, there exists only one type of adsorption state for water, which desorbs at 353 K; E is 24 kcallmol, regardless of whether it is from air exposure or water rinse. The quantity adsorbed is twice that on the surface of 304 and is not related to exposure time.(3) At 573 K, the bulk structure of 6063, that is the grain size, has been changed due to recrystallization. This process produces an obvious effect on the bulk outgassing rate of CO and CO 2 ,