2023
DOI: 10.3390/cryst13121638
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Thermal Field Design of a Large-Sized SiC Using the Resistance Heating PVT Method via Simulations

Shengtao Zhang,
Tie Li,
Zhongxue Li
et al.

Abstract: As the size of SiC crystals gradually increase, it becomes increasingly difficult to control the temperature distribution inside the crucible. In this study, numerical simulation tools were used to model the thermal field of SiC single crystal growth using the resistance heating PVT method. Through adjusting the relative position of the heater, adjusting the crucible and insulation structure, and setting up dual heaters, the temperature field distribution patterns under different conditions were obtained. The … Show more

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Cited by 2 publications
(2 citation statements)
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“…Moreover, the growth cycle of SiC single crystals is long, and the cost is high. Therefore, the growth of SiC single crystals was simulated using an axisymmetric global numerical model [15,16]. Through simulation experiments, the internal related physical field distribution was visualized.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the growth cycle of SiC single crystals is long, and the cost is high. Therefore, the growth of SiC single crystals was simulated using an axisymmetric global numerical model [15,16]. Through simulation experiments, the internal related physical field distribution was visualized.…”
Section: Introductionmentioning
confidence: 99%
“…While the process is unqualified, only the relevant improvement of each parameter condition in the model is needed and verified by calculations. Various physical problems can be solved through numerical calculations and the display of visual graphical results, which can improve research efficiency, save costs, and provide theoretical guidance for the subsequent growth of crystals [15][16][17].…”
Section: Introductionmentioning
confidence: 99%