Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micr
DOI: 10.1109/memsys.1998.659781
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Thermal flow sensor for liquids and gases

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Cited by 38 publications
(18 citation statements)
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“…Although the properties of the liquids differ significantly, their characteristic curves nearly coincide. On the other hand, measurements with sensor wires perpendicular to the flow channel show deviations of the times ∆t Max of such liquids which are as large as 15-30% [9]. A possible explanation of this observation is that due to different heat conductivity and heat capacity the temperature profile in the flow may be different even if the flow profile should be the same.…”
Section: Experimental Section and Discussionmentioning
confidence: 99%
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“…Although the properties of the liquids differ significantly, their characteristic curves nearly coincide. On the other hand, measurements with sensor wires perpendicular to the flow channel show deviations of the times ∆t Max of such liquids which are as large as 15-30% [9]. A possible explanation of this observation is that due to different heat conductivity and heat capacity the temperature profile in the flow may be different even if the flow profile should be the same.…”
Section: Experimental Section and Discussionmentioning
confidence: 99%
“…However, experiments showed that the measured time of flight was still a function of the fluid [9,10].…”
Section: Introductionmentioning
confidence: 99%
“…This approach is robust enough to measure particulate flows as well. We remark that thermal flow sensors, based on a 'time of flight' principle, are also possible [88]. In such approaches, a heater generates a short thermal pulse, and a thermal sensor detects the arrival downstream.…”
Section: Discussionmentioning
confidence: 99%
“…One of the examples of its application is for the liquid flow rate measurement (Lammerink et al 1993, Lammerink et al 1996, Ashauer et al 1998 including the micro-machined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range (Wu et al 2001). This MEMS flow sensor is generally needed to replace existing commercial sensors that are proven to be inadequate for some applications, such as the micro-chromatography, biochemical detection, and mass spectrometry purpose because of their limited sensitivity, large size, high dead volume, and difficulties in interfacing with microfluidic devices.…”
Section: Introductionmentioning
confidence: 99%