2009
DOI: 10.1016/j.microrel.2009.07.032
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Thermal imaging of smart power DMOS transistors in the thermally unstable regime using a compact transient interferometric mapping system

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Cited by 12 publications
(4 citation statements)
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“…2D holographic interferometry technique (10 ls time resolution [9,12]) and scanning heterodyne interferometer (3 ns resolution [13]) were used for the thermal mapping. These TIM techniques are based on monitoring temperature -induced changes in silicon refractive index from the device backside.…”
Section: Devices and Measurement Conditionsmentioning
confidence: 99%
See 1 more Smart Citation
“…2D holographic interferometry technique (10 ls time resolution [9,12]) and scanning heterodyne interferometer (3 ns resolution [13]) were used for the thermal mapping. These TIM techniques are based on monitoring temperature -induced changes in silicon refractive index from the device backside.…”
Section: Devices and Measurement Conditionsmentioning
confidence: 99%
“…Infrared thermography and transient interferometric mapping (TIM) method have previously been used for investigation of temperature distribution in DMOS transistors under single shot [8,9] or repetitive stress [6,7] conditions. On the other hand, thermal simulation tools have been used to optimize thermal design of the devices and system in package [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, a bipolar transistor is suitable for implementing analog functions, and a CMOS transistor is used in low-power digital circuits. Recently, there has been a growing demand for power chips that use a new bipolar-CMOS-DMOS (BCDMOS) process that can significantly improve device performances and decrease chip size by putting both analog and digital functions onto a single chip in very-large-scale integration (VLSI) systems [1]- [3]. The chip contains both laterally diffused metal-oxide-semiconductor (LDMOS) devices (12 V) for driving power transistors and CMOS devices (3.3 / 5 V) for driving digital high-speed operations [4], [5].…”
Section: Introductionmentioning
confidence: 99%
“…Методика обнаружения локального повышения температуры в приборе с помощью тепловизионных камер (см., например, [1]) имеет пространственное разрешение на уровне десятков микрометров, временное разрешение обычно отсутствует. Метод 2D TIM (transient interference mapping) [2][3][4] использует эффект изменения фазы оптического луча при прохождении через полупроводник и отражении от внешней поверхности прибора. Временное разрешение методики определяется шириной оптического импульса.…”
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