2015
DOI: 10.1007/s10854-015-2808-7
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Thermal post-annealing and gas concentration effect on liquid petroleum gas sensing characteristics of nanocrystalline zinc oxide thin films

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Cited by 13 publications
(3 citation statements)
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“…It has been reported that ultra-thin ZnO deposited by ALD can grow as islands through the Volmer-Weber growth model [18][19][20]. Moreover, annealing above 500 °C enhances the crystallization of the (001) plane [21]. After the formation of ZnO NPs, the Pd top electrode was deposited using RF sputtering and patterned through the lift-off process.…”
Section: Methodsmentioning
confidence: 99%
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“…It has been reported that ultra-thin ZnO deposited by ALD can grow as islands through the Volmer-Weber growth model [18][19][20]. Moreover, annealing above 500 °C enhances the crystallization of the (001) plane [21]. After the formation of ZnO NPs, the Pd top electrode was deposited using RF sputtering and patterned through the lift-off process.…”
Section: Methodsmentioning
confidence: 99%
“…The XRD patterns in figure 4 show crystallization in HfO 2 /ZnO after annealing.The major peaks in ZnO occur at the angles of 31.994, 34.467, and 36.269 corresponding to the (100), (002), and (101) planes respectively. HfO 2 exhibits the angles of28.540, 31.850, 34.990, and 35.720 corresponding to the ( 111), (111), (020), and (200) planes respectively[21,22].The peaks in ZnO indicate the formation of the ZnO wurtzite structure composing the NPs. Furthermore, the high…”
mentioning
confidence: 99%
“…Furthermore, ZnO has shown industrial applications concerning CWAs including gas sensing as a surface acoustic wave (SAW) sensor [25], semiconductor applicability with a wide gap energy (3.3 eV) [26], chemical stability and biocompatibility [27]. ZnO nanomaterials possess a relatively large number of Lewis and Bronsted acid-base reactive sites that cause a high adsorption capacity for a wide range of hazardous components.…”
Section: Introductionmentioning
confidence: 99%