Abstract. Silicon oxycarbide phases with different O/Si ratios were prepared by pyrolysis of highly cross-linked polysiloxane precursors. Their structure was investigated using quantitative 29Si solid-state NMR and X-ray photoelectron spectroscopy (XPS). The prominent part played by the redistribution reactions on the ceramic yield, the composition of the oxycarbide phases and their structure was illustrated. In a large range of compositions the oxycarbide phases formed by pyrolysis at moderate temperature (< 1000~ may be described as a purely random arrangement of CSi4 tetrahedra and Si--O--Si bridges.