Thermal stability of sputtered Al2O3 coatings

Edlmayr, V.; Möser, Martin; Walter, C.; Mitterer, Christian

doi:10.1016/j.surfcoat.2009.10.002

Cited by 126 publications

(30 citation statements)

References 34 publications

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“…One is to use ionized PVD (I-PVD) techniques [1], an approach that has yielded low-temperature-deposited θ-, κ-, and γ-alumina films [2,3,4,5,6,7] with higher crystallinity than for conventional PVD, and has permitted growth of α-Al 2 O 3 at temperatures below 700 °C [8,9,10]. The second approach is to promote the nucleation of α-Al 2 O 3 either by a crystallographic template such as α-Cr 2 O 3 [11,12,13] or in solid solution α-(Cr,Al) 2 O 3 [14,15,16,17].…”

Section: Introductionmentioning

confidence: 99%

Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering

et al. 2010

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Section: Introductionmentioning

confidence: 99%

Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering

et al. 2010

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“…Due to its high electrical resistivity, alumina coatings are also of interest in the microelectronics industry [5]. This is due to its high electrical breakdown field, its large band gap and its high dielectric constant [7]. The large band gap of aluminum oxide, for example, facilitates its use in a magnetic tunnel junction, the low thermal conducting, on the other hand makes it a very suitable material for thermal barrier coatings as they are used e.g.…”

Section: Introductionmentioning

confidence: 99%

Corrosion studies of DC reactive magnetron sputtered alumina coating on 304 SS

Thangaraj¹,

Mahadevan²

2017

Electrochemical Energy Technology

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Aluminum oxide films on SS 304 deposited by DC reactive magnetron sputtering technique were studied with respect to the composition of the sputter gas (Ar:O 2 ), gas pressure, substrate temperature, current etc. to achieve good insulating films with high corrosion resistance. The films were characterized by XRD and SEM techniques. Potentiodynamic polarization and electrochemical impedance spectroscopy measurements were made under static conditions in order to evaluate the corrosion performance of the alumina-coated SS 304 for various immersion durations in 0.5 M and 1 M NaCl solution. Alumina-coated SS 304 has low corrosion value of 0.4550 and 1.1090 MPY for 24 h immersion time in both solutions. The impedance plots for the alumina coated SS 304 in 1 M NaCl solution at different durations are slightly different to when compared to its immersion in 0.5 M NaCl solutions and are composed of two depressed semi circles. For the alumina coated film, the impedance spectrum decreased, when immersion time increased.

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“…It is found that the c ? a transition, at temperature of &1200°C, proceeds via the formation of the intermediate h-phase (monoclinic) [35,36], while in the presence of Ar through the metastable d-phase (orthorhombic) [37]. Consecutive phase transformations are also expected to occur, at constant temperature after cooling, in Fe-alloys which form the basis of the steel industry.…”

Section: Introductionmentioning

confidence: 99%

Modeling the kinetics of consecutive phase transitions in the solid state

Tomellini

2015

J Mater Sci

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A theoretical approach for describing the kinetics of consecutive phase transformations ruled by nucleation and growth is reported. In the considered system, the mother phase (M) transforms to an intermediate phase (a) which, in turn, transforms to the final product (b). The classical Kolmogorov-Johnson-Mehl-Avrami theory is generalized to deal with a finite-size phase with moving boundary. To this end, the statistical method based on the differential critical region has been employed. The exact solution of the kinetics is computed in closed form for the transformation of a spherical a-nucleus growing into the mother phase. By resorting to an approximate expression for the probability function entering the differential critical region method, the consecutive transformation is studied in the case of nucleation and growth of the a-phase. The time dependence of the b/a volume fraction is found to be in very good agreement with the stretched exponential kinetics, and the dependence of Avrami's exponent on both nucleation and growth rates of the two phases is investigated. Modeling of the non-isothermal kinetics at constant heating rate has also been performed which provides an insight into the shape of the differential scanning calorimetry curves for consecutive phase transitions.

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Thermal stability of sputtered Al2O3 coatings

Cited by 126 publications

References 34 publications

Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering

Texture and microstructure of Cr2O3 and (Cr,Al)2O3 thin films deposited by reactive inductively coupled plasma magnetron sputtering

Corrosion studies of DC reactive magnetron sputtered alumina coating on 304 SS

Modeling the kinetics of consecutive phase transitions in the solid state

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