Thermally induced structural and phase transformations of Mo-Si and MoSi 2 -Si x-ray multilayer mirrors

Fedorenko, A. I.; Garbuz, A. S.; Кондратенко, В. В.; Pershin, Yurii P.; Пуха, В.Е.; Poltseva, O. V.; Yulin, Sergiy; Zubarev, E. N.

doi:10.1117/12.200276

Cited by 6 publications

(3 citation statements)

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“…higher 700 K. The change of structural state for Si-layers approaching the hole edge also points to a temperature gradient. It is known that crystallization of a-Si depends on annealing time and a contacting metal, and may occur in a wide temperature range of 450-1220 K. [41][42][43][44][45] During thermal annealing of MoSi 2 /Si and Sc/Si multilayers 46,47 we also observed the crystallization of a-Si at temperatures of ~1000 K and ~970 K, respectively. As it is a fast-running process we can expect that the temperature in the region of ~18 μm wide surrounding the holes (c-Si is present) reached at least 1000 K, and in the adjoining region of several microns wide the temperature is ~300 degrees lower.…”

Section: Resultsmentioning

confidence: 84%

Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Voronov

Zubarev²,

Pershyn³

et al. 2007

SPIE Proceedings

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Multilayer mirrors for the extreme ultraviolet (EUV) are key elements for numerous applications of coherent EUV sources such as new tabletop lasers and free-electron lasers. However the field of applications is limited by the radiation and thermal stability of the multilayers. Taking into account the growing power of EUV sources the stability of the optics becomes crucial. To overcome this problem it is necessary to study the degradation of multilayers and try to increase their temporal and thermal stability. In this paper we report the results of detailed study of structural changes in Sc/Si multilayers when exposed to intense EUV laser pulses. Various types of surface damage such as melting, boiling, shock wave creation and ablation were observed as irradiation fluencies increase. Cross-sectional TEM study revealed that the layer structure was completely destroyed in the upper part of multilayer, but still survived below. The layers adjacent to the substrate remained intact even through the multilayer surface melted down, though the structure of the layers beneath the molten zone was noticeably changed. The layer structure in this thermally affected zone is similar to that of isothermally annealed samples. All stages of scandium silicide formation such as interdiffusion, solid-state amorphization, silicide crystallization etc., are present in the thermally affected zone. It indicates a thermal nature of the damage mechanism. The tungsten diffusion barriers were applied to the scandium/silicon interfaces. It was shown that the barriers inhibited interdiffusion and increased the thermal stability of Sc/Si mirrors.

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Section: Resultsmentioning

confidence: 84%

Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Voronov

Zubarev²,

Pershyn³

et al. 2007

SPIE Proceedings

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“…We note that such bilayers can degrade due to coating contamination, partial evaporation, etc. The previously reported study presented some results of temperature damage of Mo/Si bilayer with formation of molybdenum silicides [5]. The high pressure plasma light sources emit such high broadband radiation fluxes which are characterized by a global temperature and stress fields in the irradiated substrates.…”

Section: Introductionmentioning

confidence: 97%

Interaction of powerful plasma jets with Mo/Si multilayers

Skryabin

Telekh

Pavlov

et al. 2022

J. Phys.: Conf. Ser.

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“…However, we note a lack of data on the damage and degradation of the multilayers under such radiation fluxes. The multiplicity of the physical processes includes nonstationary heat transfer in thin films [35], physicochemical transformations [36], coating evaporation [11], uncertainties of optical properties in the UV/VUV range, etc. These circumstances dictate the need for close experimental studies of the processes, both gasdynamic responses from the irradiated materials and material science aspects of the coating degradation.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

et al. 2022

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This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers were used as the basis of the reflective multilayers for the visible and UV ranges. A gas-dynamic response from the irradiated surfaces was studied with schlieren photography. The properties of original and irradiated multilayers were described with ultra violet visible infrared spectroscopy (UV-Vis-IR), X-ray diffraction (XRD), X-ray reflectometry, scanning electron microscopy (SEM) and other techniques. Data on the degradation of optical properties and surface morphology were obtained.

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Thermally induced structural and phase transformations of Mo-Si and MoSi 2 -Si x-ray multilayer mirrors

Cited by 6 publications

References 0 publications

Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Interaction of powerful plasma jets with Mo/Si multilayers

Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation

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