2021
DOI: 10.1109/ted.2021.3110833
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Thermally Robust Perpendicular SOT-MTJ Memory Cells With STT-Assisted Field-Free Switching

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Cited by 8 publications
(2 citation statements)
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“…As the annealing temperature increases, the bcc (001)-CoFe texture gradually forms, which also affects the crystallization process of the [Co/Pt] m /Ru/[Co/Pt] n above. Therefore, ordinary top-pinned MTJ stacks are unable to withstand BEOL annealing temperatures of 400 • C. To address this issue, researchers propose ways to optimize the film layers respectively, such as growing a spacer layer that will not destroy the coupling between the SAF and CoFeB reference layer, or strengthening the crystallization of fcc (111)-Pt through surface modification treatment before annealing [70][71][72].…”
Section: Temperature Dependence Of Tmrmentioning
confidence: 99%
“…As the annealing temperature increases, the bcc (001)-CoFe texture gradually forms, which also affects the crystallization process of the [Co/Pt] m /Ru/[Co/Pt] n above. Therefore, ordinary top-pinned MTJ stacks are unable to withstand BEOL annealing temperatures of 400 • C. To address this issue, researchers propose ways to optimize the film layers respectively, such as growing a spacer layer that will not destroy the coupling between the SAF and CoFeB reference layer, or strengthening the crystallization of fcc (111)-Pt through surface modification treatment before annealing [70][71][72].…”
Section: Temperature Dependence Of Tmrmentioning
confidence: 99%
“…The SAFs have been extensively used as the pinning layer in magnetic tunnel junctions (MTJs) [12,13], which are indispensable for sensors [14] and magnetoresistive randomaccess memory (MRAM) [15]. In order to reduce the cell size of MTJs and increase the MRAM density, the SAFs are also proposed to be used as the free layer of MTJ [16,17].…”
Section: Introductionmentioning
confidence: 99%